红外与激光工程, 2001, 30 (4): 292, 网络出版: 2006-04-28   

干涉测量中的自适应抗振技术

Adaptive vibration-resistant techniques in interferometry
作者单位
南京理工大学电光学院,江苏,南京,210094
摘要
环境振动使干涉测量技术的应用受到制约,自适应抗振干涉术是当前消除干涉仪受外界振动影响的有效方法,也是国际上正在研究的热门课题.文中研讨并总结了国际上在这个方面的最新研究成果,并对各种方法的优缺点进行了比较.
Abstract
External vibration can cause error in surface measurement and if it is severe enough the fringes will be completely washed out. Adaptive control to compensate the effects of vibration is an effective method to eliminate external disturbance. In this article, the latest developed methods of adaptive vibration-compensated interferometry are introduced and discussed.
参考文献

[1] . General algorithm of phase-shifting interferometry by iterative least-squares fitting[J]. Opt. Eng., 1995, 34: 183-188.

[2] . Use of interferometric directinonality for noise reduction[J]. Opt. Eng., 1995, 34: 173-182.

[3] . Millisecond phase acquisition at video rates[J]. Appl. Opt., 1992, 31: 5919-5925.

[4] . New contra old wavefront measurement concepts for interferometric optical testing[J]. Opt. Eng., 1992, 31: 422-433.

[5] . Vibration-insensitive interferometer for on-line measurements[J]. Appl. Opt., 1995, 34(25): 5595-5601.

[6] Koliopoulos C L. Simultaneous phase shift interferometer[A]. Proc. SPIE[C]. 1991, 1531. 119-127.

[7] . Active phase-shifting interferometers for shape and deformation measurements[J]. Opt. Eng., 1996, 35(10): 2930-2937.

[8] . Adjustable phase control in stabilized interferometry[J]. Optics Letters, 1995, 20(6): 635-637.

[9] . Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance[J]. Opt. Eng., 1990, 29: 1511-1515.

[10] . Laser diode feedback interferometer for stabilization and displacement measurements[J]. Appl. Opt., 1987, 26: 892-897.

[11] Cole G, Burge L Dettmann. Vibration stabilization of a phase shifting interferometer for large optics[A]. Proc. SPIE[C]. 1997, 3134. 438-446.

[12] A 亚里夫,P 叶;于金荣,金锋.晶体中的光波[M].北京:科学出版社,1991.

[13] 苏大图,沈海龙,陈进榜,等.光学测量与像质鉴定[M].北京:北京工业学院出版社,1987.

[14] Cole G. Vibration compensation for a phase shifting interferometer[D]. Optical Sciences, University of Arizona, 1997.

[15] Jiyuan Liu, Ichirou Yamaguchi. Mirror surface testing by optical feedback interferometry using laser diode[A]. Proc. SPIE[C]. 1999, 3782. 407-414.

吴新民, 陈进榜, 高志山. 干涉测量中的自适应抗振技术[J]. 红外与激光工程, 2001, 30(4): 292. 吴新民, 陈进榜, 高志山. Adaptive vibration-resistant techniques in interferometry[J]. Infrared and Laser Engineering, 2001, 30(4): 292.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!