White light emission from Er, Pr co-doped AlN films

Xiang Li; Xiaodan Wang; Hai Ma; Feifei Chen; Xionghui Zeng

doi:doi:10.3788/COL201917.111602

Chinese Optics Letters, 2019, 17 (11): 111602, Published Online: Sep. 12, 2019

White light emission from Er, Pr co-doped AlN films Download： 815次

Xiang Li ¹Xiaodan Wang ^1,*Hai Ma ¹Feifei Chen ¹Xionghui Zeng ^2,**

Author Affiliations

¹ Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Mathematics and Physics, Suzhou University of Science and Technology, Suzhou 215009, China

² Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China

Figures & Tables

Fig. 1. CL spectrum of $\Pr^{3 +}$ -implanted AlN with a dose of $5 \times 10^{14} at / {cm}^{2}$ after annealing at 1050°C. Inset is the dependence of the intensity of the 528 nm luminescence peak on the implantation dose.

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Fig. 2. CL spectra and energy transfer model of ${Er}^{3 +}$ and $\Pr^{3 +}$ co-implanted AlN thin films with the different dose ratios of $\Pr^{3 +}$ with respect to ${Er}^{3 +}$ , where the dose of Er is kept as $1 \times 10^{14} at / {cm}^{2}$ . (a) CL spectra of ${Er}^{3 +}$ and $\Pr^{3 +}$ co-implanted AlN. (b) Energy transfer model between ${Er}^{3 +}$ and $\Pr^{3 +}$ .

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Fig. 3. CIE chromaticity diagram of ${Er}^{3 +}$ , $\Pr^{3 +}$ co-doped AlN film. The doses of ${Er}^{3 +}$ and $\Pr^{3 +}$ in AlN films are $1 \times 10^{14}$ and $5 \times 10^{14} at / {cm}^{2}$ .

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Table1. The CIE Chromaticity Coordinate of Er, Pr Co-implanted AlN Films

${Er}^{3 +} / \Pr^{3 +} (at / {cm}^{2})$	CIE X	CIE Y
$1 \times 10^{14} / 1 \times 10^{14}$	0.323	0.312
$1 \times 10^{14} / 5 \times 10^{14}$	0.332	0.332
$1 \times 10^{14} / 1 \times 10^{15}$	0.329	0.335

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Xiang Li, Xiaodan Wang, Hai Ma, Feifei Chen, Xionghui Zeng. White light emission from Er, Pr co-doped AlN films[J]. Chinese Optics Letters, 2019, 17(11): 111602.

White light emission from Er, Pr co-doped AlN films Download： 815次

Fig. 1. CL spectrum of $\Pr^{3 +}$ -implanted AlN with a dose of $5 \times 10^{14} at / {cm}^{2}$ after annealing at 1050°C. Inset is the dependence of the intensity of the 528 nm luminescence peak on the implantation dose.

Fig. 3. CIE chromaticity diagram of ${Er}^{3 +}$ , $\Pr^{3 +}$ co-doped AlN film. The doses of ${Er}^{3 +}$ and $\Pr^{3 +}$ in AlN films are $1 \times 10^{14}$ and $5 \times 10^{14} at / {cm}^{2}$ .

Table1. The CIE Chromaticity Coordinate of Er, Pr Co-implanted AlN Films

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White light emission from Er, Pr co-doped AlN films Download： 815次

Fig. 1. CL spectrum of Pr3+-implanted AlN with a dose of 5×1014 at/cm2 after annealing at 1050°C. Inset is the dependence of the intensity of the 528 nm luminescence peak on the implantation dose.

Fig. 2. CL spectra and energy transfer model of Er3+ and Pr3+ co-implanted AlN thin films with the different dose ratios of Pr3+ with respect to Er3+, where the dose of Er is kept as 1×1014 at/cm2. (a) CL spectra of Er3+ and Pr3+ co-implanted AlN. (b) Energy transfer model between Er3+ and Pr3+.

Fig. 3. CIE chromaticity diagram of Er3+, Pr3+ co-doped AlN film. The doses of Er3+ and Pr3+ in AlN films are 1×1014 and 5×1014 at/cm2.

Table1. The CIE Chromaticity Coordinate of Er, Pr Co-implanted AlN Films

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Fig. 1. CL spectrum of $\Pr^{3 +}$ -implanted AlN with a dose of $5 \times 10^{14} at / {cm}^{2}$ after annealing at 1050°C. Inset is the dependence of the intensity of the 528 nm luminescence peak on the implantation dose.

Fig. 3. CIE chromaticity diagram of ${Er}^{3 +}$ , $\Pr^{3 +}$ co-doped AlN film. The doses of ${Er}^{3 +}$ and $\Pr^{3 +}$ in AlN films are $1 \times 10^{14}$ and $5 \times 10^{14} at / {cm}^{2}$ .