Laser-induced damage and periodic stripe structures of a CaF<sub>2</sub> single crystal by an ArF excimer laser

Jingzhen Shao; Xu Liang; Libing You; Ning Pan; Ying Lin; Shimao Wang; Zanhong Deng; Xiaodong Fang; Xi Wang

doi:doi:10.3788/COL202018.021403

Chinese Optics Letters, 2020, 18 (2): 021403, Published Online: Dec. 30, 2019

Laser-induced damage and periodic stripe structures of a CaF₂ single crystal by an ArF excimer laser Download： 946次

Jingzhen Shao ^1,2,3Xu Liang ^1,2,3Libing You ^1,2Ning Pan ¹Ying Lin ¹Shimao Wang ^1,2Zanhong Deng ¹Xiaodong Fang ^1,2,*Xi Wang ^2,3,**

Author Affiliations

¹ Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

² Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China

³ State Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China

Figures & Tables

Fig. 1. Experimental setup for laser-induced damage test.

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Fig. 2. Exposed sites of ${CaF}_{2}$ samples and the corresponding laser fluence.

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Fig. 3. Damage probability plot, damage threshold $2.37 {J / cm}^{2}$ .

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Fig. 4. Optical micrograph of the damage site for different laser fluence.

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Fig. 5. (a), (b) Optical damage micrograph for the laser fluence of $5.10 {J / cm}^{2}$ . (c) Analysis of Newton’s rings for the four fragments [a, b, c, d in (a)]. (d) The origin of the ring pattern.

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Fig. 6. SEM image of the laser-irradiated ${CaF}_{2}$ under different laser fluence at (a) $7.34 {J / cm}^{2}$ , (b) $6.60 {J / cm}^{2}$ , (c) $5.75 {J / cm}^{2}$ , and (d) $4.53 {J / cm}^{2}$ .

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Fig. 7. SEM image of the laser-irradiated ${CaF}_{2}$ under $7.34 {J / cm}^{2}$ .

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Table1. Laser Fluence and Fringe Spacing of LIPSS

No.	I	II	III	IV	V	VI	VII	VIII	IX
Laser fluence ( $J / {cm}^{2}$ )	7.34	7.34	7.34	6.60	6.60	5.75	4.53	4.53	4.53
Fringe spacing (nm)	453	296	548	403	627	654	202	386	153

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Jingzhen Shao, Xu Liang, Libing You, Ning Pan, Ying Lin, Shimao Wang, Zanhong Deng, Xiaodong Fang, Xi Wang. Laser-induced damage and periodic stripe structures of a CaF₂ single crystal by an ArF excimer laser[J]. Chinese Optics Letters, 2020, 18(2): 021403.

Laser-induced damage and periodic stripe structures of a CaF₂ single crystal by an ArF excimer laser Download： 946次

Fig. 1. Experimental setup for laser-induced damage test.

Fig. 2. Exposed sites of ${CaF}_{2}$ samples and the corresponding laser fluence.

Fig. 3. Damage probability plot, damage threshold $2.37 {J / cm}^{2}$ .

Fig. 4. Optical micrograph of the damage site for different laser fluence.

Fig. 5. (a), (b) Optical damage micrograph for the laser fluence of $5.10 {J / cm}^{2}$ . (c) Analysis of Newton’s rings for the four fragments [a, b, c, d in (a)]. (d) The origin of the ring pattern.

Fig. 6. SEM image of the laser-irradiated ${CaF}_{2}$ under different laser fluence at (a) $7.34 {J / cm}^{2}$ , (b) $6.60 {J / cm}^{2}$ , (c) $5.75 {J / cm}^{2}$ , and (d) $4.53 {J / cm}^{2}$ .

Fig. 7. SEM image of the laser-irradiated ${CaF}_{2}$ under $7.34 {J / cm}^{2}$ .

Table1. Laser Fluence and Fringe Spacing of LIPSS

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Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser Download： 946次

Fig. 1. Experimental setup for laser-induced damage test.

Fig. 2. Exposed sites of CaF2 samples and the corresponding laser fluence.

Fig. 3. Damage probability plot, damage threshold 2.37 J/cm2.

Fig. 4. Optical micrograph of the damage site for different laser fluence.

Fig. 5. (a), (b) Optical damage micrograph for the laser fluence of 5.10 J/cm2. (c) Analysis of Newton’s rings for the four fragments [a, b, c, d in (a)]. (d) The origin of the ring pattern.

Fig. 6. SEM image of the laser-irradiated CaF2 under different laser fluence at (a) 7.34 J/cm2, (b) 6.60 J/cm2, (c) 5.75 J/cm2, and (d) 4.53 J/cm2.

Fig. 7. SEM image of the laser-irradiated CaF2 under 7.34 J/cm2.

Table1. Laser Fluence and Fringe Spacing of LIPSS

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Laser-induced damage and periodic stripe structures of a CaF₂ single crystal by an ArF excimer laser Download： 946次

Fig. 2. Exposed sites of ${CaF}_{2}$ samples and the corresponding laser fluence.

Fig. 3. Damage probability plot, damage threshold $2.37 {J / cm}^{2}$ .

Fig. 5. (a), (b) Optical damage micrograph for the laser fluence of $5.10 {J / cm}^{2}$ . (c) Analysis of Newton’s rings for the four fragments [a, b, c, d in (a)]. (d) The origin of the ring pattern.

Fig. 6. SEM image of the laser-irradiated ${CaF}_{2}$ under different laser fluence at (a) $7.34 {J / cm}^{2}$ , (b) $6.60 {J / cm}^{2}$ , (c) $5.75 {J / cm}^{2}$ , and (d) $4.53 {J / cm}^{2}$ .

Fig. 7. SEM image of the laser-irradiated ${CaF}_{2}$ under $7.34 {J / cm}^{2}$ .