单晶金刚石飞秒激光加工的烧蚀阈值实验 
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Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing
1 湖南大学汽车车身先进设计制造国家重点实验室, 湖南 长沙 410082
2 湖南大学激光研究所, 湖南 长沙 410082
图 & 表
图 1. 高斯光束的能量密度分布图
Fig. 1. Energy density distribution diagram of Gauss beam
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图 2. 镶样后的金刚石样品
Fig. 2. Diamond sample after inlaying
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图 3. 实验装置示意图
Fig. 3. Schematic of experimental device
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图 4. 不同激光功率下的单脉冲烧蚀凹坑形貌
Fig. 4. Morphology of single pulse ablation pits obtained at different laser powers
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图 5. ln Pavg与D2间的关系
Fig. 5. Relationship between ln Pavg and D2
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图 6. 不同有效脉冲数和激光平均功率下得到的金刚石烧蚀槽的微观形貌。(a) N=31,Pavg=7.7 W;(b) N=31,Pavg=10.7 W;(c) N=31,Pavg=15 W;(d) N=124,Pavg=5.3 W;(e) N=124,Pavg=8.8 W;(f) N=124,Pavg=12.3 W;(g) N=486,Pavg=4.6 W;(h) N=486,Pavg=8.8 W;(i) N=486,Pavg=10.7 W;(j) N=972,Pavg=4.6 W; (k) N=972,Pavg=6.5 W;(l) N=972,Pavg=8.8 W
Fig. 6. Microscopic morphology of diamond ablated trough obtained at different effective pulse numbers and average laser powers. (a) N=31, Pavg=7.7 W; (b) N=31, Pavg=10.7 W; (c) N=31, Pavg=15 W; (d) N=124, Pavg=5.3 W; (e) N=124, Pavg=8.8 W; (f) N=124, Pavg=12.3 W; (g) N=486, Pavg=4.6 W; (h) N=486, Pavg=8.8 W; (i) N=486, Pavg=10.7 W; (j) N=972, Pavg=4.6 W; (k) N=972, Pavg=6.5 W; (l) N=972, Pavg=8.8 W
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图 7. 不同的有效脉冲数下B2与ln Pavg的关系
Fig. 7. Relationship between B2 and ln Pavg obtained at different effective pulse numbers
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图 8. 烧蚀阈值随有效激光脉冲数的变化
Fig. 8. Change of ablation threshold varying with effective pulse number
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图 9. 金刚石在不同烧蚀阶段的烧蚀效果。(a)弱烧蚀,N=31,Pavg=10.7 W;(b)强烧蚀,N=972,Pavg=6.5 W
Fig. 9. Ablation effect of diamond in different stages. (a) Weak ablation, N=31, Pavg=10.7 W; (b) strong ablation, N=972, Pavg=6.5 W
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表 1单晶金刚石的物理性能
Table1. Physical properties of monocrystal diamond
| Property | Value |
|---|
| Thermal conductivity λ /(W·cm-1·K-1) | 20 | | Density /(g·cm-3) | 3.515 | | Constant pressure specific heatcapacity /(J·g-1·K-1) | 1.827 | | Thermal diffusivity α /(cm2·s-1) | 3.114 | | Melting point or decomposition point /℃ | 3700-4000 | | Refractive index | 2.417 | | Absorption rate (laser with awavelength of 1064 nm) | 0.25 |
|
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表 2实验中采用的激光平均功率及其对数
Table2. Average power and its logarithm used in experiment
| Number | Pavg/W | ln(Pavg/W) | Number | Pavg/W | ln(Pavg/W) |
|---|
| 0 | 11.1 | 2.41 | 8 | 20.7 | 3.03 | | 1 | 12.3 | 2.51 | 9 | 22.3 | 3.10 | | 2 | 13.4 | 2.60 | 10 | 23.4 | 3.15 | | 3 | 15.0 | 2.71 | 11 | 25.0 | 3.22 | | 4 | 16.1 | 2.78 | 12 | 26.5 | 3.28 | | 5 | 17.3 | 2.85 | 13 | 28.1 | 3.34 | | 6 | 18.0 | 2.89 | 14 | 29.4 | 3.38 | | 7 | 20.0 | 3.00 | 15 | 30.8 | 3.43 |
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表 3实验数据
Table3. Experimental data
| Number | Effectivepulsenumber | Laser scantimes | Average laserpower /W |
|---|
| 1 | 4 | 1 | 10,13.4,17.3 | | 2 | 31 | 8 | 7.7,10.7,15.0 | | 3 | 124 | 32 | 5.3,8.8,12.3 | | 4 | 486 | 125 | 4.6,8.8,10.7 | | 5 | 972 | 250 | 4.6,6.5,8.8 | | 6 | 1943 | 500 | 3.8,5.7,7.7 |
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表 4不同脉冲数下单晶金刚石材料的烧蚀阈值
Table4. Ablation threshold of single crystal diamond obtained at different pulse numbers
| Number | 1 | 2 | 3 | 4 | 5 | 6 |
|---|
| Effectivepulsenumber | 1 | 31 | 124 | 486 | 972 | 1943 | | Ablationthreshold /(J·cm-2) | 8.80 | 4.53 | 2.94 | 2.35 | 2.04 | 1.70 |
|
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陈根余, 朱智超, 殷赳, 熊彪, 金梦奇. 单晶金刚石飞秒激光加工的烧蚀阈值实验[J]. 中国激光, 2019, 46(4): 0402001. Genyu Chen, Zhichao Zhu, Jiu Yin, Biao Xiong, Mengqi Jin. Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing[J]. Chinese Journal of Lasers, 2019, 46(4): 0402001.
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