He－Ne散射光检测光学薄膜激光损伤阈值

娄俊; 苏俊宏; 徐均琪; 谢松林

应用光学, 2008, 29 (1): 0131, 网络出版: 2010-06-03

He－Ne散射光检测光学薄膜激光损伤阈值

Laser-induced damage threshold detection for optical thin films by scattered light of He-Ne laser

论文大纲

娄俊 ^*苏俊宏徐均琪谢松林

作者单位

西安工业大学光电工程学院，陕西西安 710032

He－Ne散射光激光损伤阈值等离子体闪光在线检测 He-Ne laser scattered laser-induced damage threshold plasma spark online inspection

摘要

准确测定光学薄膜的激光损伤阈值可以衡量光学薄膜的抗激光损伤能力，测定损伤阈值的关键是准确地判定损伤的发生与否。建立了He－Ne散射光检测光学薄膜激光损伤阈值系统。通过测量同一样品点的He－Ne散射光能量变化来判断薄膜表面发生的损伤，并对制备的类金刚石薄膜与HfO₂／SiO₂反射膜进行了阈值测试。与等离子体闪光法的阈值测试结果进行比较，具有较好的一致性。分析表明：He－Ne散射光测试系统能有效地判断出激光诱导损伤，易于实现在线检测。

Abstract

Precise measurement of the laser-induced damage threshold can be used to effectively evaluate the laser damage resistance of optical thin films. The determination of laser-induced damage threshold is dependent on the criteria to judge whether damage happens to the optical thin film or not. A measurement system with He-Ne laser scattered light was set up to detect the laser-induced damage threshold of optical thin films. The damage level of thin films was judged by measuring the variation of He-Ne laser scattered light energy at the same point on a sample. The damage threshold measurement for the diamond-like carbon films (DLC) and HfO₂/SiO₂ reflective coatings was performed. The measured result was compared with that of plasma spark method. Both of them have a preferable consistency. The analysis shows that the He-Ne laser scattering measurement system can be used effectively to determine laser-induced damage and it can be used in online inspection conveniently.

参考文献

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娄俊, 苏俊宏, 徐均琪, 谢松林. He－Ne散射光检测光学薄膜激光损伤阈值[J]. 应用光学, 2008, 29(1): 0131. LOU Jun, SU Jun-hong, XU Jun-qi, XIE Song-lin. Laser-induced damage threshold detection for optical thin films by scattered light of He-Ne laser[J]. Journal of Applied Optics, 2008, 29(1): 0131.

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