光学学报, 2011, 31 (12): 1222005, 网络出版: 2011-11-21
红外光谱仪多级微反射镜模拟分析及制作研究
Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer
引用该论文
郑莹, 梁中翥, 梁静秋. 红外光谱仪多级微反射镜模拟分析及制作研究[J]. 光学学报, 2011, 31(12): 1222005.
Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005.
郑莹, 梁中翥, 梁静秋. 红外光谱仪多级微反射镜模拟分析及制作研究[J]. 光学学报, 2011, 31(12): 1222005. Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005.