红外光谱仪多级微反射镜模拟分析及制作研究
郑莹, 梁中翥, 梁静秋. 红外光谱仪多级微反射镜模拟分析及制作研究[J]. 光学学报, 2011, 31(12): 1222005.
Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005.
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郑莹, 梁中翥, 梁静秋. 红外光谱仪多级微反射镜模拟分析及制作研究[J]. 光学学报, 2011, 31(12): 1222005. Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005.