双激光制备双层结构类金刚石膜的实验研究
[1] Liu Lei, Wang Tao, Huang Jinglin, et al. Diamond-like carbon thin films with high density and low internal stress deposited by coupling DC/RF magnetron sputtering[J]. Diamond & Related Materials, 2016, 70(1): 151-158.
[3] Butta M Z, Khaleeq R M, Ali D, et al. Deposition and characterization of multilayer DLC: Mo thin films grown on silicon substrate by off-axis pulsed laser deposition technique[J]. Applied Surface Science, 2015, 331(2): 407-414.
[4] Bonis A D, Rau J V, Santagata A, et al. Diamond-like carbon thin films produced by femtosecond pulsed laser deposition of fullerite[J]. Surface and Coatings Technology, 2011, 205(7): 3747-3753.
[5] Goiti M, Logothetidis S, Charitidis C. Stress relaxation and stability in thick amorphous carbon films deposited in layer structure[J]. Applied Physics Letters, 1998,73: 184-186.
[6] Logothetidis S, Charitidis C. Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon-carbon bonding[J]. Thin Solid Films, 1999, 353: 208-213.
[7] Knoblauch-Meyer L, Hauert R. Tribological properties of a: C-H multilayer structures[J]. Thin Solid Films, 1999, 338: 72-176.
[8] Cheng Y, Lu Y M, Guo Y L, et al. Multilayers diamond-like carbon film with germanium bufferlayers by pulsed laser deposition[J]. Surface Review and Letters, 2017, 24(2): 1750014.
[9] Csorbai H K, Kovach G, Peto G, et al. Diamond-DLC double layer used in corrosive protective coating[J]. Applied Surface Science, 2007, 253(11): 5070-5075.
[10] Liu Fuqiu, Lin Songsheng, Lin Kaisheng, et al. Preparation of CrN/DLC composite thin film and study on its tribological property[J]. Electroplating & Finishing, 2017, 36(1): 25-30. (in Chinese)
[11] Wang Shunhua, Shang Lunlin, Zhang Guang′an, et al. Tribological properties of DLC and CrN films under engine oil[J]. Aerospace Materials and Technology, 2014, 44(6): 20-24. (in Chinese)
[12] Yu Dayang, Ma Shengge, Zhang Yichen, et al. The properties of DLC Hard film prepared by combining unbalanced magnetron sputtering with arc plating[J]. China Surface Engineering, 2006, 19(6): 43-46. (in Chinese)
[13] Robert Eason. Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials[M]. Hoboken: John Wiley & Sons, Inc., 2007.
[14] Cheng Yong. Technology of Diamond-like Carbon Film Prepared by Pulsed Laser Deposition[M]. Beijing: Science Press, 2017. (in Chinese)
[15] Wang Yalan, Wang Huanwen, Wang Xuefeng. The cobalt oxide/hydroxide nanowall array film prepared by pulsed laser deposition for supercapacitors with superb-rate capability[J]. Electrochimica Acta, 2013, 92(2): 298-303.
[16] Psarik P, Jelinek M, Kocourek T. Chromium-doped diamond-like carbon films deposited by dual-pulsed laser deposition[J]. App Phy A, 2013, 112(1): 46-52.
[17] Lu Yimin, Huang Guojun, Guo Yanlong, et al. Improved design and experiment for preparing uniform optical DLC film by large area PLD[J]. Acta Armamentarii, 2017, 38(3): 555-560. (in Chinese)
[18] Cheng Yong, Lu Yimin, Guo Yanlong, et al. Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate[J]. Infrared and Laser Engineering, 2016, 45(6): 0610004. (in Chinese)
[19] Tang Jinfa, Gu Peifu, Liu Xu, et al. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006. (in Chinese)
陆益敏, 黄国俊, 郭延龙, 程勇, 韦尚方. 双激光制备双层结构类金刚石膜的实验研究[J]. 红外与激光工程, 2018, 47(11): 1121003. Lu Yimin, Huang Guojun, Guo Yanlong, Cheng Yong, Wei Shangfang. Experiment research on the double-layer diamond-like carbon film prepared by double laser beams[J]. Infrared and Laser Engineering, 2018, 47(11): 1121003.