超短脉冲激光及其相关应用的一些基本知识

朱晓农; 包文霞

doi:doi:10.3788/CJL201946.1200001

中国激光, 2019, 46 (12): 1200001, 网络出版: 2019-12-02

超短脉冲激光及其相关应用的一些基本知识下载： 4472次

Fundamentals of Ultrashort Pulse Laser and Its Applications

朱晓农 ^1,*包文霞 ^1,3

作者单位

¹ 南开大学现代光学研究所, 天津 300350

³ 广东华快光子科技有限公司, 广东中山 528437

图 & 表

图 1. 脉宽15 fs、中心波长800 nm、无啁啾高斯型超短脉冲激光的归一化电场(虚线)和瞬态光强(实线)

Fig. 1. Normalized electric-field strength (dashed curve) and transient intensity (solid curve) of 15-fs chirp-free Gaussian laser pulse with central wavelength of 800 nm

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图 2. 超短脉冲激光时域、频域表述的对应关系示意图,两者间满足傅里叶变换关系

Fig. 2. Relationship between time- and frequency-domains of ultrashort laser pulses. Two domains form Fourier transform pairs

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图 11. 超短脉冲激光加工中激光波长与脉宽的大致选择指南

Fig. 11. Approximate selection guide of wavelength and pulse duration in USP laser machining

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图 12. 脉冲能量对实际烧蚀宽度的影响(虚线代表烧蚀阈值)

Fig. 12. Effect of pulse energy on actual ablation pulse duration (dotted line represents ablation threshold)

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图 13. “超快激光光学”学习路线图

Fig. 13. Learning map of ultrafast laser optics

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表 1超短脉冲激光的常用技术参数

Table1. Common technical parameters of ultrashort pulse laser

Laser parameter		[Unit], common unit	Relation
	Central wavelength, λ	[m], nm, μm
	Pulse duration, Δt	[s], ps, fs
	Average power, P	[W], mW, W, kW
	Pulse repetition rate, F	[Hz], kHz, MHz	Also known as PRR
Basic parameters	Bandwidth, Δλ(or spectral width, Δν)	[m], nm, μm	Δν=Δλ×(c/λ²) [Hz]
	Polarization ratio, PR	(unitless)
	Radius of laser beam, w	[m], mm, μm
	Laser beam circularity, C	(unitless)	w_x/w_y≤100%
	Beam divergence, θ	[rad], rad, mrad
	Beam quality factor, M²	(unitless)	M²=θ/(λ/πw)(≥1)
	Pulse energy, ΔE	[J], μJ, nJ	ΔE=P/F
	Peak power, P	[W], kW, MW	P=ΔE/Δt
Derived parameters	Pulse period, T	[s], ns	T=1/F
	Area of laser beam cross section, A	[m]², cm²	A=πw²
	Energy fluence, F	[J]/[m]², J/cm²	F=2×ΔE/A
	Peak intensity, I	[W]/[m]², W/cm²	I=p/A=F/Δt
	Time bandwidth product, TBP	(unitless)	T_BP=Δt×Δν
Quality parameters	Beam parameter product, BPP	[m][rad], mm mrad	B_PP=w×θ=(λ/π)×M²
	Pulse stability	(unitless), (p-p%) rms
	Beam pointing	[rad] /[℃], rad/℃

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表 2国内外工业用某些超短脉冲激光器产品主要技术指标比较

Table2. Comparison of major technical specifications of some USP laser products for industrial applications at home and abroad

Laser			Item			Trumpf			Coherent	SP			PI			Huaray			Bellin			Huakuai			YSL
Picosecond infrared laser			Model			TruMicro5070			HyperRapidNX 1064-50	IceFyre1064-50			RGH-1064-48			Olive-1064-50			Amber IR			YPP-IR-30			PicoYL-100-100-100
			Wavelength /nm			1030			1064	1064			1064			1064			1064			1064			1030
			Average power /W			100			50	50@400 kHz			48@400 kHz			50@500 kHz			75@1MHz			30@100 kHz			100
			Pulse energy /μJ			250			220@200 kHz	200@200 kHz			420@100 kHz			200@200 kHz			250@300 kHz			200@100 kHz			100@100 ps
			Repetition rate /kHz			400-1000			200-1000	0.001-10000			100-2000			0.001-1000			0.001-1000			100-1000			100-1000
			Pulse duration /ps			<10			<15	<15			~10			<10			<15			<15			100-500
			RMS of pulseenergy stability			N/A			<1%	<1.5%			<2%			≤1%			<3%			<2%			<2%
			Pulse selection			N/A			√	√			√			√			√			√			√
			M²			<1.3			≤1.3	<1.3			≤1.3			≤1.3			<1.3			<1.3			<1.3
			Polarization ratio			N/A			>100∶1	>100∶1			>100∶1			>100∶1			>100∶1			>100∶1			N/A
Femtosecond infrared laser		Model			TruMico 5070Femto Edition			Monaco1035-80-40				Spirit1030-100			HR-Femto-IR-50-40			AxiniteIR-20			YPF-IR-20			FemtoYL^TM-100
		Wavelength /nm			1030			1035±5				1030±5			1035			1030			1030			030
		Averagepower /W			80			40@500 kHz				100@1 MHz			40@1 MHz			20@1 MHz			20			100
		Pulseenergy /μJ			200			80@500 kHz				100@1 MHz			40@1 MHz			30@500 kHz			50			200
		Repetitionrate /kHz			400-1000			0.001-1000				0.001-10000			100-5000			0.001-1000			50-500			25-5000
		Pulse duration /ps			<900			<350				<400			<350			<500			<500			~400
		RMS of pulseenergy stability			N/A			1.5%				2%			<2%			<3%			<3%			<2%
		Pulse selection			N/A			N/A				N/A			N/A			√			√			√
		M²			<1.3			<1.2				<1.2			≤1.3			<1.3			<1.3			<1.3
		Polarizationratio			N/A			>100∶1				>100∶1			>100∶1			>100∶1			>100∶1			N/A
Picosecond green laser	Model			TruMicro5270			Hyper RapidNX 532-25				RGH-532-20			Olive-532-15			Amber GR			YPP-GN-20			PicoYL-Green
	Wavelength /nm			515			532				532			532			532			532			515
	Average power /W			60			25@200 kHz				20@100 kHz			15@500 kHz			45@500 kHz			20@500 kHz			30
	Pulse energy /μJ			150			125@200 kHz				200@100 kHz			100@100 kHz			90@500 kHz			40@500 kHz			40
	Repetition rate /kHz			400-1000			200-1000				100-2000			0.001-1000			0.001-1000			400-1000			300-2500
	Pulse duration /ps			<10			<15				~7			<10			<15			<15			800
	RMS of pulseenergy stability			N/A			<2%				<2%			≤1.5%			<3%			<2%			<2%
	Pulse selection			N/A			√				√			√			√			√			√
	M²			<1.3			≤1.3				≤1.3			≤1.2			<1.3			<1.3			<1.3
	Polarization Ratio			N/A			>100∶1				>100∶1			>100∶1			>100∶1			>100∶1			N/A
Picosecond UV laser			Model			TruMicro5370			HyperRapidNX 355-15	IceFyre355-30			RGH-355-12			Olive-355-10			Amber UV			YPP-UV-10			PicoYL-UV
			Wavelength /nm			343			355	355			355			355			355			355			343
			Average power /W			30			15	30@500 kHz			12@100 kHz			10@500 kHz			30@700 kHz			15			15
			Pulse energy /μJ			75			75@200 kHz	60@500 kHz			120@100 kHz			60@100 kHz			42@700 kHz			30@500 kHz			30
			Repetition rate /kHz			400-1000			200-1000	0.001-3000			100-2000			0.001-1000			0.001-1000			400-1000			300-1200
			Pulse duration /ps			<10			<15	<15			~7			<10			<15			<15			800
			RMS of pulseenergy stability			N/A			<2%	<2%			<3%			≤1.5%			<3%			<5%			<2%
			Pulse selection			N/A			√	√			√			√			√			√			√
			M²			<1.3			≤1.3	<1.3			≤1.3			≤1.2			<1.3			<1.3			<1.3
			Polarization ratio			N/A			>100∶1	>100∶1			>100∶1			>100∶1			>100∶1			>100∶1			N/A

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朱晓农, 包文霞. 超短脉冲激光及其相关应用的一些基本知识[J]. 中国激光, 2019, 46(12): 1200001. Xiaonong Zhu, Wenxia Bao. Fundamentals of Ultrashort Pulse Laser and Its Applications[J]. Chinese Journal of Lasers, 2019, 46(12): 1200001.

超短脉冲激光及其相关应用的一些基本知识下载： 4472次

图 1. 脉宽15 fs、中心波长800 nm、无啁啾高斯型超短脉冲激光的归一化电场(虚线)和瞬态光强(实线)

Fig. 1. Normalized electric-field strength (dashed curve) and transient intensity (solid curve) of 15-fs chirp-free Gaussian laser pulse with central wavelength of 800 nm

图 2. 超短脉冲激光时域、频域表述的对应关系示意图,两者间满足傅里叶变换关系

Fig. 2. Relationship between time- and frequency-domains of ultrashort laser pulses. Two domains form Fourier transform pairs

图 11. 超短脉冲激光加工中激光波长与脉宽的大致选择指南

Fig. 11. Approximate selection guide of wavelength and pulse duration in USP laser machining

图 12. 脉冲能量对实际烧蚀宽度的影响(虚线代表烧蚀阈值)

Fig. 12. Effect of pulse energy on actual ablation pulse duration (dotted line represents ablation threshold)

图 13. “超快激光光学”学习路线图

Fig. 13. Learning map of ultrafast laser optics

表 1超短脉冲激光的常用技术参数

Table1. Common technical parameters of ultrashort pulse laser

表 2国内外工业用某些超短脉冲激光器产品主要技术指标比较

Table2. Comparison of major technical specifications of some USP laser products for industrial applications at home and abroad

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图 1. 脉宽15 fs、中心波长800 nm、无啁啾高斯型超短脉冲激光的归一化电场(虚线)和瞬态光强(实线)

Fig. 1. Normalized electric-field strength (dashed curve) and transient intensity (solid curve) of 15-fs chirp-free Gaussian laser pulse with central wavelength of 800 nm

图 2. 超短脉冲激光时域、频域表述的对应关系示意图,两者间满足傅里叶变换关系

Fig. 2. Relationship between time- and frequency-domains of ultrashort laser pulses. Two domains form Fourier transform pairs

图 11. 超短脉冲激光加工中激光波长与脉宽的大致选择指南

Fig. 11. Approximate selection guide of wavelength and pulse duration in USP laser machining

图 12. 脉冲能量对实际烧蚀宽度的影响(虚线代表烧蚀阈值)

Fig. 12. Effect of pulse energy on actual ablation pulse duration (dotted line represents ablation threshold)

图 13. “超快激光光学”学习路线图

Fig. 13. Learning map of ultrafast laser optics

表 1超短脉冲激光的常用技术参数

Table1. Common technical parameters of ultrashort pulse laser

表 2国内外工业用某些超短脉冲激光器产品主要技术指标比较

Table2. Comparison of major technical specifications of some USP laser products for industrial applications at home and abroad

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