光学学报, 2014, 34 (8): 0831003, 网络出版: 2014-07-15   

金属氧化物薄膜在中波红外光谱区内光学常数色散特性 下载: 548次

Dispersive Properties of Optical Constants of Some Metallic Oxide Thin Films in the Mid-Infrared Regions
作者单位
1 中国航天科工飞航技术研究院天津津航技术物理研究所天津市薄膜光学重点实验室, 天津 300192
2 哈尔滨工业大学光电子技术研究所, 黑龙江 哈尔滨 150080
3 同济大学物理科学与工程学院精密光学工程技术研究所, 上海 200092
引用该论文

刘华松, 季一勤, 张锋, 刘丹丹, 冷健, 王利栓, 姜玉刚, 陈德应, 焦宏飞, 鲍刚华, 程鑫彬. 金属氧化物薄膜在中波红外光谱区内光学常数色散特性[J]. 光学学报, 2014, 34(8): 0831003.

Liu Huasong, Ji Yiqin, Zhang Feng, Liu Dandan, Leng Jian, Wang Lishuan, Jiang Yugang, Chen Deying, Jiao Hongfei, Bao Ganghua, Cheng Xinbin. Dispersive Properties of Optical Constants of Some Metallic Oxide Thin Films in the Mid-Infrared Regions[J]. Acta Optica Sinica, 2014, 34(8): 0831003.

参考文献

[1] He Qi, Guo Huibin, Wei Junjun, et al.. Deposition of HfO2 thin films on ZnS substrates [J]. Thin Solid Films, 2008, 516(15): 4695-4699.

[2] C C Clark, A H Lettington, S J Wakeham, et al.. A new properties antireflection coating for multispectral ZnS [C]. SPIE, 2001, 4375: 266-274.

[3] D Franta, I Ohlídal, D Petrydes. Optical characterization of TiO2 thin films by the combined method of spectroscopic ellipsometry and spectroscopic photometry [J]. Vacuum, 2005, 80(1): 159-162.

[4] 贾宏宝, 孙菁华, 徐耀, 等. 利用透射光谱与X射线反射谱精确测量溶胶凝胶TiO2薄膜厚度和光学常数 [J]. 光学学报, 2012, 32(8): 0831001.

    Jia Hongbao, Sun Jinghua, Xu Yao, et al.. Determination of thickness and optical constants of sol-gel derived TiO2 films by combined analysis of transmittance and X-ray reflectivity spectra [J]. Acta Optica Sinica, 2012, 32(8): 0831001

[5] 范欢欢, 章岳光, 沈伟东, 等. 原子层沉积制备Ta2O5薄膜的光学特性研究[J]. 光学学报, 2011, 31(10): 1031001.

    Fan Huanhuan, Zhang Yueguang, Shen Weidong, et al.. Optical properties of Ta2O5 thin films fabricated by atomic layer deposition [J]. Acta Optica Sinica, 2011, 31(10): 1031001.

[6] V H Mudavakkat, V V Atuchin, V N Kruchinin, et al.. Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films [J]. Optical Materials, 2012, 34(5): 893-900.

[7] W A Odarych. Ellipsometric studies of the features of the formation of HfO2 films on optical glass [J]. J Opt Technol, 2009, 76(5): 306-311.

[8] Y J Sik. Spectroscopic ellipsometry studies on the optical constants of indium thin oxide films deposited under various sputtering conditions [J]. Thin Solid Films, 2004, 467(1): 36-42.

[9] C Guo, M Kong, W Gao, et al.. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements [J]. Opt Lett, 2013, 38(1): 40-42.

[10] T Buffeteau, B Desbat. Thin-film optical constants determined from infrared reflectance and transmittance measurements [J]. Applied Spectroscopy, 1989, 43(6): 1027-1032.

[11] Harland G Tompkins, Eugene A Irene. Handbook of Ellipsometry [M]. William Andrew: Springer Press, 2005. 159-172.

[12] J A Dobrowolski, R A Kemp. Refinement of optical multilayer systems with different optimization procedures [J]. Appl Opt, 1990, 29(19): 2876-2893.

[13] 刘华松, 王利栓, 姜承慧, 等. SiO2薄膜的可见光与红外波段光学常数的色散特性[J]. 光学学报, 2013, 33(10): 1031002.

    Liu Huasong, Wang Lishuan, Jiang Chenghui, et al.. Research on the dispersive properties of optical constants of SiO2 films in the visible and infrared regions [J]. Acta Optica Sinica, 2013, 33(10): 1031002.

[14] Y Morimoto, T Igarashi, H Sugahara, et al.. Analysis of gas release from vitreous silica [J]. J Non-Cryst Solids, 1992, 139: 35-46.

[15] P B McGinnis, J E Shelby. Diffusion of water in vitreous silica [J]. J Non-Cryst Solids, 1994, 179: 185-193.

[16] D K MeElfresh, D G Howitt. A structure base model for diffusion in glass and the determination of diffusion constants in silica [J]. J Non-Cryst Solids, 1990, 124: 474-480.

[17] K M Davids, M Tomozawa. An infrared spectroscopic study of water-related species in silica glasses [J]. J Non-Cryst Solids, 1996, 201: 177-198.

刘华松, 季一勤, 张锋, 刘丹丹, 冷健, 王利栓, 姜玉刚, 陈德应, 焦宏飞, 鲍刚华, 程鑫彬. 金属氧化物薄膜在中波红外光谱区内光学常数色散特性[J]. 光学学报, 2014, 34(8): 0831003. Liu Huasong, Ji Yiqin, Zhang Feng, Liu Dandan, Leng Jian, Wang Lishuan, Jiang Yugang, Chen Deying, Jiao Hongfei, Bao Ganghua, Cheng Xinbin. Dispersive Properties of Optical Constants of Some Metallic Oxide Thin Films in the Mid-Infrared Regions[J]. Acta Optica Sinica, 2014, 34(8): 0831003.

本文已被 8 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!