压电工作台的神经网络建模与控制
[1] 李庆祥,王东生,李玉和. 现代精密仪器设计[M]. 北京:清华大学出版社,2004.
LI Q X, WANG D SH, LI Y H. Design of Modern Precision Instruments[M]. Beijing: Tsinghua University Press, 2004. (in Chinese)
[2] LI Y M,XU Q S. A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nano manipulation[J]. IEEE Transactions on Automation Science and Engineering, 2011, 8(2): 265-279.
[3] 陈立国,张洋,孙立宁,等. 多目标拓扑优化设计在纳米定位平台中的应用[J]. 压电与声光,2011,33(2):228-231.
CHEN L G, ZHANG Y, SUN L N, et al.. Application of multi-objective topology optimization design on the nano-positioning stage[J]. Piezoelectics & Acoustooptics, 2011, 33(2): 228-231. (in Chinese)
[4] POLIT S, DONG J Y. Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing[J]. IEEE/ASME Transactions on Mechatronics, 2011, 16(4): 724-733.
[5] LI Y M,XU Q S. A novel piezoactuated XY stage with parallel decoupled, and stacked flexure structure for micro-/nanopositioning [J]. IEEE Transactions on Industrial Electronics, 2011, 58(8): 3601-3615.
[6] 张栋,张承进,魏强. 压电微动工作台的动态迟滞模型[J]. 光学 精密工程,2009,17(3): 549-556.
[7] JEDLICSKA I, WEISS R, WEIGEL R. Linearizing the output characteristic of GMR current sensors through hysteresis modeling[J]. IEEE Transactions on Industrial Electronics, 2010, 57(5): 1728-1734.
[8] TAN X B, IVER R V. Modeling and control of hysteresis[J]. IEEE Transactions on Control Systems, 2009, 29(1): 26-28.
[9] DEVASIA S, ELEFTHERIOU E, MOHEIMANI S O R. A survey of control issues in nanopositioning[J]. IEEE Transactions on Control Systems Technology, 2007, 15(5): 802-823.
[10] 赖志林,刘向东,耿洁,等. 压电陶瓷执行器迟滞的滑模逆补偿控制[J]. 光学 精密工程,2011,19(6):1281-1290.
[11] TAO G, KOKOTOVIC P V. Adaptive Control of Systems with Actuator and Sensor Nonlinearities[M]. New York: Wiley. 1996.
[12] GE P, JOUANEH M. Modeling hysteresis in piezoceramic actuators[J]. Precision Engineering, 1995, 17(3):211-221.
[13] KRASNOSELSKII M, POKROVSKII A. Systems with Hysteresis[M]. New York: Springer-Verlag, 1994.
[14] JANAIDEH M A, RAKHEJA S, SU CH Y. An analytical generalized Prandtl-Ishlinskii model inversion for hysteresis compensation in micropositioning control[J]. IEEE/ASME Transactions on Mechatronics, 2011, 16(4): 734-744.
[15] YI J, CHANG S, SHEN Y. Disturbance-observer-based hysteresis compensation for piezoelectric actuators[J]. IEEE/ASME Transactions on Mechatronics, 2009, 14(4): 456-464.
[16] 马连伟,谭永红,邹涛. 基于神经网络的迟滞逆模型[J]. 控制理论与应用,2008,25(5):823-826.
MA L W, TAN Y H, ZOU T. A neural-network-based inverse hysteresis model[J]. Control Theory & Application, 2008, 25(5): 823-826. (in Chinese)
[17] 张新良,谭永红. 基于输入空间扩张的动态迟滞神经网络模型[J]. 自动化学报,2009,35(3):319-323.
ZHANG X L, TAN Y H. Neural network model for the dynamic hysteresis based on the expanded input space[J]. Acta Automatica Sinica, 2009,35(3): 319-323. (in Chinese)
[18] 赵新龙,谭永红,董建萍. 基于扩展输入空间法的压电执行器迟滞特性动态建模[J]. 机械工程学报,2010,46(20):169-174.
ZHAO X L, TAN Y H, DONG J P. Dynamic modeling of rate-dependent hysteresis in piezoelectric actuators based on expanded input space method[J]. Journal of Mechanical Engineering, 2010, 46(20): 169-174. (in Chinese)
[19] DONG R L, TAN Y H. A neural networks based model for rate-dependent hysteresis for piezoceramic actuators[J]. Sensors and Actuators, 2008, 143: 370-376.
[20] 刘向东,修春波,李黎,等. 迟滞非线性系统的神经网络建模[J].压电与声光,2007,29(1):106-108.
LIU X D, XIU CH B, LI L, et al.. Hysteresis modeling using neural networks[J]. Piezoelectics & Acoustooptics, 2007, 29(1): 106-108. (in Chinese)
[21] 耿洁,刘向东,陈振,等.Preisach迟滞逆模型的神经网络分类排序[J]. 光学 精密工程,2010,18(4):855-862.
[22] TANG J, WANG K W. High authority and nonlinearity issues in active passive hybrid piezoelectric networks for structural damping[J]. Journal of Intelligent Material Systems and Structures, 2000, 11(3): 581-591.
[23] SU C Y, STEPANENKO Y, SVOBODA J, et al.. Robust adaptive control of a class of nonlinear systems with unkown backlash like hysteresis[J]. IEEE Transactions on Automatic Control, 2000, 45(12): 2427-2432.
[24] WEI J D, SUN C T. Constructing hysteresis memory in neural networks[J]. IEEE Transactions on Systems, Man and Cybernetics-Part B: Cybernetics, 2000, 30(4): 601-609.
[25] 阎平凡,张长水. 人工神经网络与模拟进化计算[M]. 2版.北京:清华大学出版社,2005.
YAN P F, ZHANG CH SH. Artificial Neural Network and Simulated Evolutionary Computation [M]. 2 nd ed. Beijing: Tsinghua University Press, 2005. (in Chinese)
[26] 袁曾任. 人工神经元网络及其应用[M]. 北京:清华大学出版社,1999.
YUAN Z R. Artificial Neural Networks and Application[M]. Beijing: Tsinghua University Press, 1999. (in Chinese)
[27] 张栋,张玉林,李现明,等. 扫描电化学显微镜压电工作台的建模与控制[J]. 仪器仪表学报,2009,30(12):2669-2675.
ZHANG D, ZHANG Y L, LI X M, et al.. Modeling and control of SECM piezo-stage[J]. Chinese Journal of Scientific Instrument, 2009, 30(12): 2669-2675. (in Chinese)
张栋, 张承进, 魏强, 田艳兵, 赵景波, 李现明. 压电工作台的神经网络建模与控制[J]. 光学 精密工程, 2012, 20(3): 587. ZHANG Dong, ZHANG Cheng-jin, WEI Qiang, TIAN Yan-bing, ZHAO Jing-bo, LI Xian-ming. Modeling and control of piezo-stage using neural networks[J]. Optics and Precision Engineering, 2012, 20(3): 587.