光学学报, 1998, 18 (12): 1697, 网络出版: 2006-10-18
纳米精度外差干涉仪非线性漂移的研究
Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers
外差干涉仪 非线性 非线性漂移 纳米测量 波片 heterodyne interferometer nonlinearity nonlinearity drift nanometer measurement wave plate
摘要
在纳米精度外差干涉仪中,由于非线性的温度漂移,成为外差干涉仪实现纳米精度测量的重要误差源。本文对差动干涉仪的理论分析得出了如下的结论:干涉仪中除了存在测量光路和参考光路以外,还存在参考光误差分量和测量光误差分量的额外光路,从而引入新的干涉混叠,产生非线性漂移;1/4波片的相位延迟量误差和安装误差是引入非线性漂移的主要因素,其影响程度是一阶的。提高波片加工精度,并尽量减少其级数可降低非线性漂移。
Abstract
Study on nonlinearity of differential heterodyne interferometer indicates that nonlinearity of heterodyne interferometer drifts with thermal modulation. This drift of nonlinearity is of particular importance in nanometer measurement. Theoretical analysis shows that the ratardation error and orientation error of the wave plate are the main reason, its influence is in the first order. These conclusions fit well with the experiment results.
参考文献
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戴高良, 殷纯永, 谢广平. 纳米精度外差干涉仪非线性漂移的研究[J]. 光学学报, 1998, 18(12): 1697. 戴高良, 殷纯永, 谢广平. Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers[J]. Acta Optica Sinica, 1998, 18(12): 1697.
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