多脉冲飞秒激光烧蚀硅的热累积效应
张明鑫, 李志明, 聂劲松, 谢运涛. 多脉冲飞秒激光烧蚀硅的热累积效应[J]. 光电子技术, 2018, 38(4): 224.
ZHANG Mingxin, LI Zhiming, NIE Jinsong, XIE Yuntao. Heat Accumulation Effect of Multipulse Femtosecond Laser Ablation of Silicon[J]. Optoelectronic Technology, 2018, 38(4): 224.
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张明鑫, 李志明, 聂劲松, 谢运涛. 多脉冲飞秒激光烧蚀硅的热累积效应[J]. 光电子技术, 2018, 38(4): 224. ZHANG Mingxin, LI Zhiming, NIE Jinsong, XIE Yuntao. Heat Accumulation Effect of Multipulse Femtosecond Laser Ablation of Silicon[J]. Optoelectronic Technology, 2018, 38(4): 224.