中国激光, 2021, 48 (2): 0202017, 网络出版: 2020-12-24   

飞秒激光组装一维纳米材料及其应用 下载: 2442次特邀综述

Femtosecond Laser Assembly of One-Dimensional Nanomaterials and Their Application
作者单位
1 华中科技大学光学与电子信息学院武汉光电国家研究中心, 湖北 武汉 430074
2 清华大学机械工程系, 教育部先进材料加工技术重点实验室, 摩擦学国家重点实验室, 北京 100084
图 & 表

图 1. 传统的一维纳米材料的组装方法。(a)原位生长组装法;(b)生长后组装法

Fig. 1. Traditional assembly methods of 1D nanomaterials. (a) In-situ assembly method; (b) post-growth assembly method

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图 2. 一维纳米材料非激光直写组装技术。(a)模板辅助生长法[28];(b)流体驱动组装法[7];(c)接触印刷法[8];(d)拉伸技术[23];(e)LB膜法[9,29];(f)介电泳法[10];(g)磁场驱动法[11];(h)电流体

Fig. 2. Assembly technology of 1D nanomaterials based on non-laser direct writing. (a) Template assisted method[28]; (b) fluid-flow method[7]; (c) contact printing method[8]; (d) stretching technique[23]; (e) LB technique[9,29]<

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图 3. 飞秒激光制备的Au纳米线聚集体微纳结构[44]。(a) Au纳米线聚集形成的示意图和物理机制;(b)不同激光功率密度下Au纳米线掺杂光刻胶的激光聚合形貌

Fig. 3. Femtosecond laser fabricated Au nanowire aggregate microstructures[44]. (a) Schematic of formation of Au nanowire aggregation and its mechanism; (b) morphologies of laser fabricated aggregates of Au nanowires doped photoresist under different laser power densities

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图 4. 飞秒激光组装的Au纳米棒[45]。(a)飞秒激光组装Au纳米棒示意图;(b)变形金刚汽车标志和(c)螺旋线的SEM图; (d) 10 mW,(e) 25 mW,(f) 40 mW激光功率下组装微结构的Au纳米棒形貌

Fig. 4. Femtosecond laser assembled Au nanorods[45]. (a) Schematic of laser assembly of Au nanorods; SEM images of (b) Transformers car logo and (c) spiral ring; microstructural morphologies of Au nanorods fabricated under laser powers of (d)10mW, (e) 25mW, and (f) 40mW

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图 5. 双色激光打印单根金纳米线[46]。(a)双色激光打印装置图;(b)双色激光捕获和准直金纳米线示意图;(c)PEG修饰的金纳米线的归一化消光光谱;打印的金纳米线(d)“O” 和(e)“X”图案的SEM图;“OX”图案在(f)非偏振光、(g)垂直偏振光和(h)水平偏振光激发下的暗场白光瑞利散射图

Fig. 5. Two-color laser printing of individual Au nanowire[46]. (a) Schematic of two-color laser printing setup; (b) schematic of laser trapping and aligning of Au nanowires; (c) normalized extinction spectrum of PEG decorated Au nanowires; SEM images of (d) “O” and (e) “X” patterns of printed Au nanowires; dark-field white light Rayleigh scattering images of “OX” patterns excited by (f) non-polarized laser, (g) vertically polarized laser, and (h) horizo

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图 6. Ag NWs硫醇功能化和ATA复合微纳结构[47]。(a)Ag NWs硫醇功能化示意图;(b)硫醇包覆Ag NWs的TEM图像;(c)纯丙烯酸树脂和ATA复合微纳结构的质谱图;(d)微螺旋光子晶体、(e)微弹簧和(f)微超级电容器的SEM图

Fig. 6. Ag NWs thiol functionalization and ATA composite micro/nanostructures[47]. (a) Schematic of Ag NWs thiol functionalization; (b) TEM image of thiol-capped Ag NWs; (c) mass spectra of structures fabricated using pure acrylate and ATA composite; SEM images of (d) spiral-like photonic crystal, (e) micro-coil, and (f) micro-capacitor

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图 7. 激光在ATA复合微纳结构中纳米熔接Ag NWs[47]。(a)激光纳米熔接Ag NWs过程示意图,结点处经历了Ag原子活化、激发、扩散三个过程;Ag NW结点处在激光辐照熔接(b)之前和(c)之后的TEM图像和晶格衍射图;(d)AgNW熔接结点处TEM 放大图;(e)两根Ag NWs在(111)生长平面上的熔接示意图

Fig. 7. Laser nano-joining of Ag NWs within ATA composites[47]. (a) Schematic of laser nano-joining of Ag NWs junctions including three processes of initiation, activation, and diffusion; TEM images and crystal lattice diffraction images of Ag NW junctions (b) before and (c) after laser irradiation fusion; (d) magnified TEM image of fused Ag NW junctions; (e) scheme of welding two Ag NWs over (111) growing plane

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图 8. 飞秒激光直写制备SWNTs/聚合物复合结构[13]。(a)飞秒激光直写制备三维SWNT/聚合物复合物微纳结构示意图;(b)阵列线所组成的立方体微结构示意图和SEM图像;(c)极坐标下立方体G峰相对强度随偏振方向与激光扫描方向夹角的变化曲线;悬臂梁结构的(d)示意图和(e)SEM图像;(f)极坐标下G峰相对强度随激光偏振方向与悬臂梁轴向夹角的变化曲线

Fig. 8. Femtosecond laser direct writing of SWNTs/polymer composites[13]. (a) Schematic of femtosecond laser direct writing of 3D SWNTs/polymer composites; (b) SEM images and schematic of stereo structures made of nanowire arrays; (c) polar-diagram of G-band relative intensity versus angle between laser polarization direction and scanning direction; (d) schematic and (e) SEM image of alignment of suspended cantilever structure; (f) polar-diagram of G-ban

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图 9. 飞秒激光直写组装MWNTs[50]。(a)TPP制备实验装置图;(b)聚合的MA光刻胶(下)和MTA光刻胶(上)对比图;(c)新制备的和放置了一周的MTA光刻胶对比图;(d)可弯曲PET衬底上TPP加工的金电极图案; (e)微弹簧、(f)微金字塔、(g)螺旋光子晶体、(h)微电容器阵列和(i)微齿轮的SEM 图

Fig. 9. Femtosecond laser direct writing and assembly of MWTNs[50]. (a) Experimental setup of TPP fabrication; (b) comparison of polymerized MA photoresist (down) and MTA photoresist (up); (c) comparison of newly fabricated MTA photoresist and that after one week; (d) TPP fabricated Au electrode pattern on flexible PET substrate; SEM images of (e) micro-coil inductor, (f) micro-pyramid, (g) spiral photonic crystal, (h) micro-capacitor array, and (i) micr

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图 10. 飞秒激光组装MWNTs电学和机械性能表征[51]。(a)退火后的MWNTs复合微米线结构的SEM图;(b)极坐标下微米线G峰相对强度随偏振方向与微米线轴向夹角的变化曲线;(c)不同激光扫描方向的长条形导电沟道SEM图;(d)长条形导电沟道的电流-电压特性曲线图;(e)MTA复合木堆结构的SEM 图;(f)MTA木堆结构的体积收缩率随MWNTs掺杂浓度的变化曲线

Fig. 10. Electrical and mechanical performance characterization of femtosecond laser assembled MWNTs[51]. (a) SEM micrograph of MWNTs micro-line structure after annealing; (b) polar-diagram of G-band relative intensity versus angle between laser polarization direction and micro-wire axial direction; (c) SEM micrographs of long rectangle bars fabricated under different laser scanning directions; (d) current-voltage characteristic curves of long rectangle b

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图 11. 飞秒激光直写制备ZnO NWs/聚合物复合微纳结构[61]。(a)不同掺杂浓度的ZnO NWs/聚合物微立方体结构;(b)ZnO NWs/聚合物复合微纳结构的光电子能谱图;(c)ZnO NWs粉末(i),纯光敏树脂聚合物微纳结构(ii)和ZnO NWs/聚合物复合微纳结构(iii)的拉曼光谱;(d)ZnO NW粉末(i)和ZnO NWs/聚合物复合微纳结构(ii)的荧光光谱

Fig. 11. Femtosecond laser direct writing and fabrication of ZnO NWs/polymer composite micro/nanostructures [61]. (a) ZnO NWs/polymer stereo microstructures with different doping concentrations; (b) photoelectron spectra of ZnO NWs/polymer composite micro/nanostructures; (c) Raman spectra of ZnO NWs powder (i), pure resin polymer micro/nanostructures (ii) , and ZnO NWs/polymer composite micro/nanostructures (iii); (d) fluorescence spectra of ZnO NW powder

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图 12. 飞秒激光直写组装ZnO NWs[62]。(a)纯丙烯酸酯树脂与ZNA复合树脂的比较图;(b)ZnO NWs经硅烷偶联剂修饰前后的水滴接触角测试对比图;(c)纯丙烯酸酯树脂与ZNA复合树脂的二次谐波光谱对比图;(d)(e)飞秒激光组装ZnO NWs原理示意图;(f)ZNA复合微纳结构的SEM图像,包括螺旋状光子晶体和视觉环

Fig. 12. Femtosecond laser direct writing and assembly of ZnO NWs [62]. (a) Comparison of pure acrylate resin and ZNA composite resin; (b) water contact angle diagrams of ZnO NWs before and after silane modification; (c) SHG spectra of pure acrylate resin and ZNA composite resin; (d)(e) schematic diagrams of femtosecond laser assembly of ZnO NWs; (f) SEM images of ZNA composite micro/nanostructures, including spiral photonic crystal and visual-ring

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图 13. ZNA复合微纳结构中ZnO NWs的定向排布表征[62]。 (a)ZNA 花瓣结构的光学显微图;ZNA花瓣结构的(b)P-SHG极化图和(c)(d)面扫描成像图;ZNA(e)网格和(f)木堆结构经过高温热处理后的SEM图像,右上角插图为木堆结构退火前的SEM图

Fig. 13. Alignment characterization of ZnO NWs in ZNA composite micro/nanostructures[62]. (a) Optical micrograph of ZNA flower pattern; (b) P-SHG polar-diagram and (c)(d) mapping images of ZNA flower pattern; (e) SEM images of ZNA (e) grid and (f) woodpile structures after high temperature thermal treatment and upper right corner is SEM image before annealing of woodpile structure

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图 14. 飞秒激光组装Au纳米棒用于SERS探测[45]。(a)基于金纳米棒微纳结构的微流控芯片的SERS 探测示意图;(b)R6G探测分子的拉曼光谱

Fig. 14. Femtosecond laser assembly of Au nanorods used for SERS detection [45]. (a) Schematic of SERS detection of microfluidic chip based on Au nanorod micro/nanostructure; (b) Raman spectrum of R6G probe molecules

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图 15. ATA复合微纳结构的温度相关导电性表征[47]。导电性测试的(a)示意图和(b)装置图;(c)纯丙烯酸树酯和ATA复合结构在激光焊接和523 K情况下的电流-电压曲线图;(d)ATA复合微纳结构的温度循环导电性测试曲线

Fig. 15. Temperature-dependent electrical conductivity characterization of ATA composite micro/nanostructures [47]. (a)Schematic and (b) setup for electrical conductivity test; (b) current-voltage curves of ATA composite structure and pure pure acrylate resin under laser welding and 523 K; (d) temperature-dependent electrical conductivity of ATA composite micro/nanostructure

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图 16. TPP飞秒激光直写制备的MWNTs功能性器件[50]。(a) MWNTs复合聚合物线阵列经过真空热退火后的SEM图像,插图为组装的MWNT束的SEM放大图;(b) MWNTs复合聚合物线阵列退火前后的电流-电压曲线;(c) Au对电极间电容器阵列的光学显微图像,插图展示了单个电容器的SEM图像;(d)电容器阵列的磁滞回线;(e)锯齿形电阻阵列的光学显微图像,插图展示了单个锯齿形电阻的SEM图像;(f) MTA复合结构传导线和铜传输线的频率响应特性曲线

Fig. 16. TPP-based femtosecond laser direct writing and fabrication of MWNTs-based functional devices [50]. (a) SEM image of MWNTs composite polymer array after vacuum thermal annealing and magnified SEM image of assembled MWNT bundle shown in inset; (b) current-voltage curves of MWNTs composite polymer line array before and after thermal annealing; (c) optical micrograph of capacitor array between two Au electrodes and SEM image of single capacitor shown

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图 17. TPP飞秒激光直写制备的ZnO NWs偏振相关紫外探测器[62]。(a)示意图;(b)光学显微图;(c)器件的时间分辨响应;(d)不同紫外光偏振角度下器件的光电流

Fig. 17. ZnO NWs-based polarized UV photodetectors fabricated by TPP-based femtosecond laser direct writing [62]. (a) Schematic; (b)optical micrograph; (c) time-resolved response of device; (d) photocurrents of device under different UV polarization angles

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图 18. SWMTs/聚合物复合微纳结构中SWMTs定向排布强度的表征[13]。(a)不同线宽悬空纳米线的SEM图像;(b)SWNTs的准直系数随着悬空纳米线线宽的变化;(c)沿相互垂直激光扫描方向分别加工的微立方块结构的SEM图,左侧立方块由沿x轴方向排布的NWs组成,右侧立方块由沿y轴方向排布的NWs组成;(d)微立方块结构示意图;(e)微立方块结构的偏振SHG极化图

Fig. 18. Alignment intensity characterization of SWNTs in SWNTs/polymer composite microstructures[13]. (a) SEM images of suspended nanowires with different wire widths; (b) nematic order parameter versus wire width; (c) SEM images of micro-cubes fabricated along mutually perpendicular laser scanning direction, in which left cube is made of NWs arranged along x-axis and right cube is made of NWs arranged along y-axis; (d) structural diagram o

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图 19. 飞秒激光组装ZnO NWs的示意图[62]。(a)组装机理图;(b)不同扫描路径和偏振方向下激光加工的正方形结构以及相对应的偏振SHG面扫描图像

Fig. 19. Schematic of femtosecond laser assembly of ZnO NWs [62]. (a) Schematic of assembly mechanism; (b) square structures fabricated under different laser scanning routes and polarization directions and their polarized SHG mapping images

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龙婧, 焦玢璋, 范旭浩, 刘耘呈, 邓磊敏, 曲良体, 熊伟. 飞秒激光组装一维纳米材料及其应用[J]. 中国激光, 2021, 48(2): 0202017. Jing Long, Binzhang Jiao, Xuhao Fan, Yuncheng Liu, Leimin Deng, Liangti Qu, Wei Xiong. Femtosecond Laser Assembly of One-Dimensional Nanomaterials and Their Application[J]. Chinese Journal of Lasers, 2021, 48(2): 0202017.

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