中国激光, 2007, 34 (4): 530, 网络出版: 2007-04-25   

超分辨近场结构中二元共晶合金掩膜的工作机制

Working Mechanism of the Binary Eutectic Alloy Mask Layer in Super-Resolution Near-Field Structure
作者单位
中国科学院上海光学精密机械研究所, 上海 201800
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瞿青玲, 王阳, 干福熹. 超分辨近场结构中二元共晶合金掩膜的工作机制[J]. 中国激光, 2007, 34(4): 530.

瞿青玲, 王阳, 干福熹. Working Mechanism of the Binary Eutectic Alloy Mask Layer in Super-Resolution Near-Field Structure[J]. Chinese Journal of Lasers, 2007, 34(4): 530.

参考文献

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瞿青玲, 王阳, 干福熹. 超分辨近场结构中二元共晶合金掩膜的工作机制[J]. 中国激光, 2007, 34(4): 530. 瞿青玲, 王阳, 干福熹. Working Mechanism of the Binary Eutectic Alloy Mask Layer in Super-Resolution Near-Field Structure[J]. Chinese Journal of Lasers, 2007, 34(4): 530.

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