拼接式反射镜共相误差检测

郑彬; 陆培芬; 陈永和; 傅雨田

doi:doi:10.3788/AOS201737.1112002

光学学报, 2017, 37 (11): 1112002, 网络出版: 2018-09-07

拼接式反射镜共相误差检测下载： 796次

Co-Phase Error Detection of Segmented Mirrors

郑彬 ^1,3,4陆培芬 ²陈永和 ^1,3傅雨田 ^1,3,*

作者单位

¹ 中国科学院上海技术物理研究所, 上海 200083

² 华东师范大学精密光谱科学与技术国家重点实验室, 上海 200062

³ 中国科学院红外成像与探测技术重点实验室, 上海 200083

⁴ 中国科学院大学, 北京 100049

图 & 表

图 1. 拼接子镜共相检测系统光路图

Fig. 1. Optical path of the segmented mirror co-phase detection system

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图 2. (a)掩模板示意图;(b)掩模板与拼接面的对准示意图;(c)棱镜阵列

Fig. 2. (a) Schematic of the mask plate; (b) alignment schematic of mask plate and segmented mirrors; (c) prism array

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图 3. 11幅衍射模板图样。(a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 3. Eleven diffraction template patterns. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

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图 4. 图3中每幅模板图样的强度等高线图。(a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 4. Contour maps of every template pattern in Fig. 3. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

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图 5. (a)相位板;(b)双半圆孔衍射掩膜板;(c)仅剩下单孔的双半圆孔衍射掩膜板

Fig. 5. (a) Phase plate; (b) double semicircle diffraction mask plate; (c) double semicircle diffraction mask plate with only one hole

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图 6. 波长为635 nm时4种相位差对应的衍射图样。(a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 6. Diffraction patters corresponding to four phase differences with the wavelength of 635 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

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图 7. 波长为650 nm时4种相位差对应的衍射图样。(a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 7. Diffraction patters corresponding to four phase differences with the wavelength of 650 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

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表 1波长为635 nm时4种情形的相关匹配结果

Table1. Correlation matching results of the four situations when the wavelength is 635 nm

Half wavelength period	Optical path difference
Half wavelength period	0.36λ	0.72λ	1.08λ	-2.16λ
-5λ/20	0.759	0.871	0.490	0.845
-4λ/20	0.895	0.858	0.478	0.856
-3λ/20	0.881	0.837	0.475	0.873
-2λ/20	0.842	0.803	0.836	0.831
-λ/20	0.658	0.388	0.841	0.418
0	0.470	0.364	0.843	0.489
λ/20	0.439	0.350	0.851	0.471
2λ/20	0.501	0.343	0.844	0.761
3λ/20	0.655	0.772	0.474	0.796
4λ/20	0.737	0.887	0.481	0.824
5λ/20	0.759	0.871	0.490	0.845

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表 2波长为650 nm时4种情形的相关匹配结果

Table2. Correlation matching results of the four situations when the wavelength is 650 nm

Half wavelength period	Optical path difference
Half wavelength period	0.35λ	0.70λ	1.06λ	-2.11λ
-5λ/20	0.867	0.712	0.430	0.448
-4λ/20	0.879	0.721	0.606	0.788
-3λ/20	0.893	0.680	0.667	0.880
-2λ/20	0.790	0.481	0.767	0.890
-λ/20	0.395	0.327	0.862	0.762
0	0.409	0.332	0.870	0.460
λ/20	0.423	0.328	0.884	0.457
2λ/20	0.414	0.528	0.852	0.705
3λ/20	0.408	0.607	0.826	0.737
4λ/20	0.786	0.779	0.609	0.629
5λ/20	0.867	0.712	0.430	0.448

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表 3λ1=635 nm、λ2=650 nm时双波长窄带共相算法结果

Table3. Results of the two wavelength narrow band co-phase algorithm with λ1=635 nm, λ2=650 nm

Parameter	Optical path difference
Parameter	229 nm	458 nm	687 nm	-1347 nm
z₁	-4λ₁/20	4λ₁/20	λ₁/20	-3λ₁/20
z₂	-3λ₂/20	4λ₂/20	λ₂/20	-2λ₂/20
m	1	1	2	-4
n	1	1	2	-4
$\begin{matrix} {h_{1}}_{} \end{matrix}$ /nm	190.5	444.5	666.75	-1365.25
$\begin{matrix} {h_{2}}_{} \end{matrix}$ /nm	227	455	682.5	-1365
Error value of $\begin{matrix} {h_{1}}_{} \end{matrix}$ /nm	-38.5	13.5	-20.25	18.25
Error value of $\begin{matrix} {h_{2}}_{} \end{matrix}$ /nm	-2	-3	-4.5	18

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郑彬, 陆培芬, 陈永和, 傅雨田. 拼接式反射镜共相误差检测[J]. 光学学报, 2017, 37(11): 1112002. Bin Zheng, Peifen Lu, Yonghe Chen, Yutian Fu. Co-Phase Error Detection of Segmented Mirrors[J]. Acta Optica Sinica, 2017, 37(11): 1112002.

拼接式反射镜共相误差检测下载： 796次

图 1. 拼接子镜共相检测系统光路图

Fig. 1. Optical path of the segmented mirror co-phase detection system

图 2. (a)掩模板示意图;(b)掩模板与拼接面的对准示意图;(c)棱镜阵列

Fig. 2. (a) Schematic of the mask plate; (b) alignment schematic of mask plate and segmented mirrors; (c) prism array

图 3. 11幅衍射模板图样。(a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 3. Eleven diffraction template patterns. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

图 4. 图3中每幅模板图样的强度等高线图。(a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 4. Contour maps of every template pattern in Fig. 3. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

图 5. (a)相位板;(b)双半圆孔衍射掩膜板;(c)仅剩下单孔的双半圆孔衍射掩膜板

Fig. 5. (a) Phase plate; (b) double semicircle diffraction mask plate; (c) double semicircle diffraction mask plate with only one hole

图 6. 波长为635 nm时4种相位差对应的衍射图样。(a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 6. Diffraction patters corresponding to four phase differences with the wavelength of 635 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

图 7. 波长为650 nm时4种相位差对应的衍射图样。(a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 7. Diffraction patters corresponding to four phase differences with the wavelength of 650 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

表 1波长为635 nm时4种情形的相关匹配结果

Table1. Correlation matching results of the four situations when the wavelength is 635 nm

表 2波长为650 nm时4种情形的相关匹配结果

Table2. Correlation matching results of the four situations when the wavelength is 650 nm

表 3λ1=635 nm、λ2=650 nm时双波长窄带共相算法结果

Table3. Results of the two wavelength narrow band co-phase algorithm with λ1=635 nm, λ2=650 nm

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拼接式反射镜共相误差检测 下载： 796次

图 1. 拼接子镜共相检测系统光路图

Fig. 1. Optical path of the segmented mirror co-phase detection system

图 2. (a)掩模板示意图;(b)掩模板与拼接面的对准示意图;(c)棱镜阵列

Fig. 2. (a) Schematic of the mask plate; (b) alignment schematic of mask plate and segmented mirrors; (c) prism array

图 3. 11幅衍射模板图样。(a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 3. Eleven diffraction template patterns. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

图 4. 图3中每幅模板图样的强度等高线图。(a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 4. Contour maps of every template pattern in Fig. 3. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

图 5. (a)相位板;(b)双半圆孔衍射掩膜板;(c)仅剩下单孔的双半圆孔衍射掩膜板

Fig. 5. (a) Phase plate; (b) double semicircle diffraction mask plate; (c) double semicircle diffraction mask plate with only one hole

图 6. 波长为635 nm时4种相位差对应的衍射图样。(a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 6. Diffraction patters corresponding to four phase differences with the wavelength of 635 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

图 7. 波长为650 nm时4种相位差对应的衍射图样。(a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 7. Diffraction patters corresponding to four phase differences with the wavelength of 650 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

表 1波长为635 nm时4种情形的相关匹配结果

Table1. Correlation matching results of the four situations when the wavelength is 635 nm

表 2波长为650 nm时4种情形的相关匹配结果

Table2. Correlation matching results of the four situations when the wavelength is 650 nm

表 3λ1=635 nm、λ2=650 nm时双波长窄带共相算法结果

Table3. Results of the two wavelength narrow band co-phase algorithm with λ1=635 nm, λ2=650 nm

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