SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser

Zhiyu Zhang; Yang Xu; Binzhi Zhang

doi:doi:10.3788/col201513.s12203

Chinese Optics Letters, 2015, 13 (s1): S12203, Published Online: Jan. 27, 2015

SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser

Zhiyu Zhang ¹Yang Xu ²Binzhi Zhang ¹

Author Affiliations

¹ Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China

² Jilin University, Changchun 130025, China

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Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203.

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