本文提出了一种新的测量多层光学薄膜参数的方法。利用玻璃载物片夹一层水再夹一层酒精构成了含有两层准光波导薄膜的多层薄膜结构。观察并测量了这两层准光波导的m线,得到了薄膜的光学参数。薄膜折射率的测量误差为±1×10~(-3),薄膜厚度的测量误差为±0.1μm。

A new method for measuring multi-layer optical film parameters is proposed, which is based on observation of quasi-waveguide leaky modes. As an example, two liquid layers separated by a glass slide and sandwiched between a prism and another slide, were studied. Leaky mode mlines of the two layers were measured, and used for calculation of the parameters of the two layers. The errors of refractive index of the measured film and the thickness are about ±0.001 and ±0.1μm, respectively.