黏滑驱动式小型精密运动平台

时运来; 娄成树; 张军; 程丁继

doi:doi: 10.3788/ope.20182605.1124

光学精密工程, 2018, 26 (5): 1124, 网络出版: 2018-08-14

黏滑驱动式小型精密运动平台

Small precision motion platform based on stick-slip driving principle

论文大纲

时运来 ^*娄成树张军程丁继

作者单位

南京航空航天大学机械结构力学及控制国家重点实验室, 江苏南京 210016

黏滑驱动压电叠堆平台精密运动力学分析 stick-slip driving piezoelectric stack platform precision motion mechanical analysis

摘要

为满足微纳操作系统对精密驱动技术的需求, 本文提出了一种基于黏滑原理的小型精密运动平台。该平台将柔性铰链、惯性质量块以及弹性元件结合为独立的定子基座, 并与压电叠堆、陶瓷球固连为定子, 安装在平台基座底部, 通过螺钉调节弹性元件端部垂直方向的位置, 就可以改变定子与移动台间的预压力, 进而获得最佳的驱动力。为研究黏滑驱动的运动机理, 分析各参数对平台运动的影响, 进行了力学建模; 而摩擦力作为黏滑驱动的关键因素, 为了能准确地表达黏滑驱动的摩擦机理, 在力学建模中引入了LuGre摩擦模型, 并利用Matlab/Simulink软件进行了仿真分析。设计加工的黏滑驱动平台的整体尺寸为40 mm×40 mm×18 mm, 质量为32 g。试验表明: 该平台最小可实现10 nm的运动步长, 速度最高可达2.5 mm/s, 行程为22 mm。

Abstract

To realize precise actuation of micro/nano-manipulation systems, a type of nano-motion platform based on the stick-slip principle was designed. Flexure hinges, a mass block, and an elastic component were integrated as an independent stator base. The stator consisted of a stator base, a piezoelectric stack, and a ceramic ball installed in the base bottom. The vertical position of the end of the elastic component can be adjusted by rotating an adjustment screw to change the pre-pressure between the stator and moving platform. Thus, the optimal driving force can be obtained. Because of the motion mechanisms of stick-slip driving and the influence of various parameters on the platform motion, mechanical modeling was carried out. Friction force was of key significance for stick-slip driving. In order to accurately express the friction mechanism of stick-slip driving, the LuGre friction model was introduced into the mechanical modeling. The simulation analysis was performed using MATLAB/Simulink software. The overall size of the stick-slip driving platform is 40 mm×40 mm×18 mm, and its mass is 32 g. Experiments show that the platform can achieve a minimum step size of 10 nm, its highest speed is 2.5 mm/s, and its stroke is 22 mm.

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时运来, 娄成树, 张军, 程丁继. 黏滑驱动式小型精密运动平台[J]. 光学精密工程, 2018, 26(5): 1124. SHI Yun-lai, LOU Cheng-shu, ZHANG Jun, CHENG Ding-ji. Small precision motion platform based on stick-slip driving principle[J]. Optics and Precision Engineering, 2018, 26(5): 1124.

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