仿真分析了用均匀分布的探测器点阵测量激光光斑方法中,探测器灵敏度的线性工作动态范围,灵敏度的一致性差异,点阵间距等参数和光斑质心位置的测量误差,光束总能量的测量误差,以及光斑的分布等.仿真结果表明,当探测器灵敏度的一致性差异小于10%,线性工作范围的动态范围大于30dB,点阵间距小于光斑直径的1/5时,光束总能量的误差小于6%,光斑质心位置的测量误差小于光斑直径的2%,拟合的光斑分布和实际光斑分布比较接近.

The article analyses and simulates the variation of beam energy error,spot centroid error and spot distribution with the detector sensitivity dynamic range, sensitivity difference and space between detectors in laser spot measurement by uniform square detector array. Simulation results show that if detector sensitivity dynamic range is more than 30dB, sensitivity difference is less than 10% and space between contiguous detectors is less than 20% of beam diameter, beam energy error is less than 6%, spot centroid error is less than 2% of beam diameter and the spot distribution imitated is comparatively ideal.