Overview: Since the groundbreaking discovery of gravitational waves, the scientific community has fervently pursued the exploration of low-frequency gravitational waves to glean deeper insights into the cosmos. The inherent limitations of ground-based conditions, however, pose formidable challenges for detectors in capturing gravitational waves below the 1 Hz threshold. Consequently, the imperative has shifted toward the deployment of space-based gravitational wave detectors as the paramount solution for effective low-frequency gravitational wave detection. At the crux of space-based gravitational wave detection lies the pivotal role of spaceborne telescopes. Given the expansive transmission distances spanning magnitudes of 10⁹ m between celestial constellations, the demand for nanoradian-level precision in telescope pointing accuracy becomes non-negotiable. The concomitant necessity for high-precision measurements and calibration emerges as a prerequisite for achieving the exacting standards of pointing accuracy in spaceborne telescopes dedicated to gravitational wave detection. To ameliorate the deleterious effects of pointing deviations on gravitational wave detection, this study strategically optimizes key parameters, including microlens structures, detector selection, and algorithmic frameworks, thereby achieving a breakthrough in high-precision pointing deviation measurements. Leveraging a low-density microlens array with extended sub-aperture focal lengths enhances the spatial scale of the light spot within each sub-aperture. This, coupled with detectors boasting a high signal-to-noise ratio, synergistically elevates the pointing detection accuracy of each discrete lens. Moreover, the paper introduces an innovative, Hartmann principle-based methodology for high-precision pointing deviation measurements, deploying a spatially reused paradigm across multiple sub-apertures. By aggregating measurement results from diverse sub-apertures, the approach effectively mitigates the influence of assorted random errors on measurement accuracy, thereby markedly enhancing the precision of pointing deviation measurements. Illustrating the efficacy of these methodologies, the paper exemplifies their application within the ambit of the "Tianqin Plan" for space-based gravitational wave detection. Employing numerical simulations and factoring in the design parameters of the Hartmann sensor, the study performs a meticulous analysis of pointing deviation measurement accuracy. Comparative analysis between single sub-aperture and sub-aperture correlation reuse technologies reveals a compelling enhancement in measurement accuracy, approximating a sevenfold improvement with the latter. The pointing deviation measurement accuracy achieved through sub-aperture correlation reuse technology is quantified at approximately 18.81 nanoradians. Considering the optical magnification inherent in spaceborne telescopes, estimated at around 30 times, the resultant pointing deviation measurement accuracy reaches an impressive 0.62 nanoradians. This design precision significantly surpasses the stipulated 1 nanoradian accuracy requirement for ground-based gravitational wave pointing deviation measurements. As a prudential measure, the proposed design incorporates a substantial margin to accommodate potential accuracy diminution attributable to external perturbations during empirical testing.

Overview: The space gravitational wave detection telescope is one of the core payloads of the gravitational wave detection satellite, simultaneously expanding and contracting the transmitted beam. Optical path stability is one of the core indices for the telescope, closely related to its structural stability. To meet the ultra-high path stability and structural stability requirements posed by the gravitational wave detection mission, it is essential to study the structural deformation measurement of the telescope. Currently, there are still several shortcomings in the research of multi-degree-of-freedom deformation measurement methods for gravitational wave detection telescopes, such as inaccurate selection of measurement points, inability to decouple multi-degree-of-freedom coupling, and unclear identification of error sources in multi-degree-of-freedom measurement. This paper deeply investigates the high-precision measurement of structural deformation of space-borne telescopes designed for space gravitational wave detection. It preliminarily establishes a framework and method system for measuring the structural deformation of space-borne telescopes, theoretically describing the measurement principle of the method. The feasibility of this method applied to space gravitational wave detection is verified through simulation analysis and error decomposition. The paper focuses on resolving the issue of decoupling multiple degrees of freedom, establishing a mathematical model using analytical methods, and conducting preliminary validation using Zemax. Finally, noise analysis of the measurement system is carried out, with experimental testing of the main noise components in the measurement system, validating the correctness of the theoretical noise model proposed in this paper. The experimental results show that near 1 Hz, the displacement noise background of the single-link interferometer is 100 pm/Hz^1/2. At 1 mHz in the low-frequency range, the displacement noise background reaches 10 nm/Hz^1/2. The noise level of the measurement system below 1 mHz is mainly limited by environmental temperature noise, while above 10 mHz, it is primarily constrained by laser frequency noise, phase acquisition background noise, and vibration noise. During the development phase of the space gravitational wave detection telescope, the research on this measurement method is expected to fulfill the telescope's multi-degree-of-freedom deformation measurement needs. It also provides data feedback for telescope design and offers guidance for the study of the telescope's optical path stability.

为了实现对微小物体的高精度三维测量，本文构建了一套基于结构光照明的三维形貌测量系统，对该系统所使用的相位编码算法、远心相机标定算法和投影仪标定算法进行了研究。首先，通过边缘提取算法获得二维平面标靶的特征点坐标，使用改进的张氏标定算法完成远心相机标定，通过相位编码结构光得到相机像素与投影仪像素之间的映射关系。然后，由映射关系使投影仪也能捕获特征点的位置信息，进而完成投影仪标定。最后，基于立体视觉模型对被测物体进行三维重建。实验结果表明，标定后的测量系统视场大于2 000 mm²，全视场的测量精度约为32 μm，中心视场的测量精度为10 μm。该系统具有良好的稳定性和重复性，能够满足大多数工业检测的应用需求，展示出广阔的应用前景。

针对复杂电磁环境和复杂大型系统电磁干扰测量参数、测量点位及测量工况多的特点，采用传统扫频式频域测量方法具有代价高、耗时长等现实问题，提出了一种低频电磁干扰的多通道时域快速测量与信号计算方法，并研制出低频电磁干扰多通道时域快速测量系统，实验验证表明提出的测量、计算方法和研制出的测量系统可以准确得到复杂电磁环境和大型系统的低频电磁干扰特性，且测量速度快、成本低。

小模数齿轮在实际制造中，单条产线多台设备通常同时生产多种不同参数的齿轮，迄今无法用单台齿轮测量仪器在生产线上同时实时全检这些不同参数的齿轮。开发了基于Facet的齿轮亚像素边缘定位算法、基于迭代重加权最小二乘的齿轮中心定位法、圆与齿廓交点快速定位法、正弦函数拟合齿数法和齿廓近似测压力角法等；若结合适当的送料与定位机构，本文方法能够在未知参数时，实现多种不同型号齿轮的混合测量，无需装夹，测量效率高。可以实现齿数、模数、压力角、齿顶圆直径、齿根圆直径、全齿高、齿宽、公法线变动量、变位系数、齿廓偏差和形位误差的测量。实验结果表明：该方法测量0.5~1.0 mm模数的直齿轮的重复性精度为4 μm。该方法在小模数齿轮柔性化生产线具有重要应用前景。