Overview: The space gravitational wave detection telescope is one of the core payloads of the gravitational wave detection satellite, simultaneously expanding and contracting the transmitted beam. Optical path stability is one of the core indices for the telescope, closely related to its structural stability. To meet the ultra-high path stability and structural stability requirements posed by the gravitational wave detection mission, it is essential to study the structural deformation measurement of the telescope. Currently, there are still several shortcomings in the research of multi-degree-of-freedom deformation measurement methods for gravitational wave detection telescopes, such as inaccurate selection of measurement points, inability to decouple multi-degree-of-freedom coupling, and unclear identification of error sources in multi-degree-of-freedom measurement. This paper deeply investigates the high-precision measurement of structural deformation of space-borne telescopes designed for space gravitational wave detection. It preliminarily establishes a framework and method system for measuring the structural deformation of space-borne telescopes, theoretically describing the measurement principle of the method. The feasibility of this method applied to space gravitational wave detection is verified through simulation analysis and error decomposition. The paper focuses on resolving the issue of decoupling multiple degrees of freedom, establishing a mathematical model using analytical methods, and conducting preliminary validation using Zemax. Finally, noise analysis of the measurement system is carried out, with experimental testing of the main noise components in the measurement system, validating the correctness of the theoretical noise model proposed in this paper. The experimental results show that near 1 Hz, the displacement noise background of the single-link interferometer is 100 pm/Hz^1/2. At 1 mHz in the low-frequency range, the displacement noise background reaches 10 nm/Hz^1/2. The noise level of the measurement system below 1 mHz is mainly limited by environmental temperature noise, while above 10 mHz, it is primarily constrained by laser frequency noise, phase acquisition background noise, and vibration noise. During the development phase of the space gravitational wave detection telescope, the research on this measurement method is expected to fulfill the telescope's multi-degree-of-freedom deformation measurement needs. It also provides data feedback for telescope design and offers guidance for the study of the telescope's optical path stability.

为了提高超精密设备中多自由度工作台的效率和精度，在满足纳米精度要求的同时提高工程调试与集成效率，提出了一种针对多自由度工作台的轨迹规划方案。对前道工艺的应用场景和机电系统能力进行分析描述，聚焦轨迹规划的难点，提出了整定控制参数和确定轨迹动力学约束参数的方法。通过差分进化算法整定反馈控制器参数，再以控制器的实际跟踪效果和应用需求为优化目标，运用蒙特卡洛算法对参考轨迹进行优化迭代。最后与传统工程调试进行了实验对比。实验结果表明：在工作台扫描运动的重复定位精度均达到±5nm/3σ要求的前提下，本文提出的方案能使跟踪误差快速收敛，调参次数减少约90%。该方案在保证超高运动定位精度的同时能够有效地提高工程调试与集成效率。

为提高XY工作台对应功能点的空间位置精度，提出了一种六自由度（6-DOF）误差在线测量方法，并建立了相应的误差补偿模型。采用激光干涉原理测量工作台X，Y轴方向的定位误差和Z轴方向的直线度误差，采用激光自准直原理测量工作台绕X，Y，Z轴转动的角度误差，从而实现6-DOF误差的在线测量。分析了6-DOF误差造成工作台对应功能点的空间位置误差，建立了基于阿贝原则和布莱恩原则的误差补偿模型。根据提出的测量方法，研制了一套高精度紧凑型的在位、在线6-DOF测量系统，将其应用于一台微纳米三坐标测量机的工作台上；以SIOS激光干涉仪为参考，对测量系统和误差补偿模型的有效性进行了实验验证，并评定了系统的不确定度。结果表明：经过6-DOF误差测量和补偿后，参考功能点在X，Y，Z向的最大位置误差由1.7 μm，3.4 μm，3 μm分别减小至65 nm，81 nm，109 nm，其扩展不确定度分别为90 nm，98 nm，158 nm（k=2）。该方法和系统可被用于提高XY工作台的精度。

针对多自由度测量技术中存在的测量范围有限、精度低和阿贝误差等问题，设计了一种大行程、高精度、可溯源、四自由度同时测量的外差干涉测量系统。采用碘稳频532 nm固体激光器作为测量仪光源，结合光纤耦合技术对双频光进行空间分离。使用差分波前传感技术实现位移、俯仰角和偏转角的同步检测，并采用楔面棱镜测量直线度的变化。该测量系统可以抑制双频光混叠引起的非线性误差，行程范围为6 m，位移分辨率为0.13 nm，俯仰角和偏转角分辨率为0.026 μrad，直线度分辨率为14.88 nm，测量结果具有可溯源性。