硅基光电子集成光控相控阵的研究进展 
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Silicon-Based Optoelectronic Integrated Optical Phased Array
吉林大学电子科学与工程学院集成光电子学国家重点联合实验室, 吉林 长春 130012
图 & 表
图 1. 相位调制光控相控阵的原理示意图
Fig. 1. Schematic of phase modulation optical phased array (OPA)
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图 2. 利用光栅耦合器实现扫描的示意图
Fig. 2. Schematic of grating coupler for beam scanning
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图 3. 片上集成激光源的光控相控阵示意图
Fig. 3. Schematic of OPA integrated with on-chip laser
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图 4. (a)大规模纳米光控相控阵示意图,插图为单个天线的特写;(b)部分结构的电子显微镜(SEM)图;(c)单个天线的电子显微镜图
Fig. 4. (a) Schematic of large-scale nanophotonic phased array, the inset is close-up view of one antenna unit; (b) scanning electron microscope (SEM) of part of whole structure; (c) close-up SEM of one antenna unit
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图 5. 全集成光束扫描器件整体布局
Fig. 5. Over arrangement of fully integrated beam scanner
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图 6. 混合集成光控相控阵示意图
Fig. 6. Schematic of hybrid-integrated OPA
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图 7. (a)调频连续波全固态激光雷达设计方案; (b)一角硬币上的激光雷达晶片; (c)设备的光学显微图
Fig. 7. (a) Schematic of solid-state FMCW lidar system; (b) lidar chiplet on top of one dime; (c) optical micrograph of device
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图 8. (a)简化的装置示意图; (b)星形耦合器的光学显微镜图;(c)移除包层的发射器的电子显微镜图,插图为另一个角度下的发射器示意图
Fig. 8. (a) Schematic of simplified structure of device; (b) optical microscope image of star coupler;(c) tilted SEM image of emitter with removed cladding, the inset is schematic of emitter at a different angle
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图 9. 极坐标系中典型的天线辐射方向图
Fig. 9. Typical directional antenna radiation pattern in polar coordinate
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图 10. (a)硅光子相干成像器件示意图; (b)在标准IME硅绝缘体工艺上制作的硅光子相干成像器件的显微镜图
Fig. 10. (a) Schematic of silicon nanophotonic coherent imager (NCI); (b) micro-photograph of NIC implemented by standard IME silicon-on-insulator process
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表 1一维扫描相控阵性能参数
Table1. Specifications of one-dimensional scanning phased array
| Ref. | Lasersource | Total number ofwaveguides | Wavelength /nm | Scanningangle /(°) | Beam width /(°)(steered axis) | Beam width /(°)(non-steered axis) |
|---|
| [21] | Off-chip | 12 | 1550 | 10.2 | - | - | | [22] | Off-chip | 16 | 1550 | 23 | 1.27 | - | | [23] | On-chip | 8 | ≈1594 | 12 | 1.8 | 0.6 | | [24] | Off-chip | 16 | 1550 | 51 | 3.3 | - |
|
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表 2二维扫描相控阵性能参数
Table2. Specifications of two-dimensional scanning phased array
| Ref. | Lasersource | Totalnumber ofwaveguides | Wavelength /nm (horizontaldirection) | Beamwidth /(°)(horizontaldirection) | Scanningangle /(°)(horizontaldirection) | Wavelength /nm(verticaldirection) | Scanningangle /(°)(verticaldirection) | Beamwidth /(°)(verticaldirection) |
|---|
| [28] | Off-chip | 16 | 1550 | 2.7 | 2.3 | 1500-1600 | 14.1 | 2.4-2.8 | | [30] | Off-chip | 16 | 1555 | 0.6 | 20 | 1525-1625 | 14 | 1.6 | | [31] | Off-chip | 16 | 1500-1600 | 3.5-4.0 | 50 | 1500-1600 | 15 | 3.5-4 | | [34] | Off-chip | 8×8 | 1550 | 1.6 | 12 | 1550 | 12 | 1.6 | | [35] | On-chip | 16 | 1550 | 1.2 | 20 | 1480-1580 | 15 | 0.5 | | [37] | Off-chip | 2×2 | 1550.91 | - | 30 | 1550.91 | 30 | - | | [38] | On-chip | 32 | - | 1 | 23 | 1555-1605 | 3.6 | 0.6 | | [40] | Off-chip | 4×4 | 1550 | - | 4.93 | 1550 | 4.93 | - | | [41] | Off-chip | 50 | 1550 | 0.85 | 46 | 1454-1641 | 36 | 0.18 | | [43] | On-chip | 128 | 1300 | 0.14±0.02 | 80 | 1260-1360 | 17 | 0.142±0.005 |
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庄东炜, 韩晓川, 李雨轩, 宋俊峰. 硅基光电子集成光控相控阵的研究进展[J]. 激光与光电子学进展, 2018, 55(5): 050001. Dongwei Zhuang, Xiaochuan Han, Yuxuan Li, Junfeng Song. Silicon-Based Optoelectronic Integrated Optical Phased Array[J]. Laser & Optoelectronics Progress, 2018, 55(5): 050001.
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