光学学报, 2020, 40 (20): 2004001, 网络出版: 2020-09-30
电压调制ZnO紫外探测器光响应截止波长的研究 
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Spectral Response Cutoff Wavelength of ZnO Ultraviolet Photodetector Modulated by Bias Voltage
图 & 表
图 2. ZnO薄膜的性能表征。 (a) ZnO薄膜和Al2O3的XRD图; (b) ZnO薄膜的紫外-可见吸收光谱,插图为(αhν)2-hν图谱
Fig. 2. Performance characterization of ZnO film. (a) XRD spectra of ZnO film and Al2O3; (b) UV-visible absorption spectrum of ZnO film with (αhν)2-hν spectrum shown in inset
图 3. ZnO紫外光电探测器的性能表征。(a) MSM结构的ZnO紫外光电探测器的SEM图;(b) 器件的断面SEM图;(c) ZnO薄膜的俯视SEM图;(d) Au膜的俯视SEM图
Fig. 3. Performance characterization of ZnO ultraviolet photodetector. (a) SEM image of ZnO ultraviolet photodetector with MSM structure; (b) cross-sectional SEM image of device; (c) top view of SEM image of ZnO film; (d) top view of SEM image of Au film
图 5. ZnO紫外光电探测器的光谱响应曲线。(a)不同外加偏压下的ZnO光电探测器的响应度;(b) 响应度峰值与外加偏压的关系;(c) ZnO光电探测器的归一化响应度;(d) 响应截止边的放大图,插图为响应截止边与外加偏压的关系
Fig. 5. Spectral responsivity curves of ZnO ultraviolet photodetector.(a) Responsivity of ZnO ultraviolet photodetector with different external bias voltages; (b) peak responsivity versus external bias voltage; (c) normalized responsivity of ZnO ultraviolet photodetector; (d) enlarged diagram of response cutoff wavelength with response cutoff wavelength versus bias voltage shown in inset
段雨晗, 丛明煜, 蒋大勇, 梁庆成. 电压调制ZnO紫外探测器光响应截止波长的研究[J]. 光学学报, 2020, 40(20): 2004001. Yuhan Duan, Mingyu Cong, Dayong Jiang, Qingcheng Liang. Spectral Response Cutoff Wavelength of ZnO Ultraviolet Photodetector Modulated by Bias Voltage[J]. Acta Optica Sinica, 2020, 40(20): 2004001.
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