基于粒子群优化算法的透射滤光片设计

高健; 王庆康; 王丹燕

doi:doi:10.7510/jgjs.issn.1001-3806.2018.05.007

激光技术, 2018, 42 (5): 617, 网络出版: 2018-09-11

基于粒子群优化算法的透射滤光片设计

Design of transmittance filters based on particle swarm optimization algorithm

论文大纲

高健王庆康 ^*王丹燕

作者单位

上海交通大学薄膜与微细技术教育部重点实验室,上海 200240

光栅滤光片粒子群优化算法透射效率 gratings filtering particle swarm optimization algorithm transmission efficiency

摘要

为了优化器件的结构参量, 把光栅结构的周期、高度、占空比作为优化的粒子, 采用粒子群优化算法和严格耦合波分析算法, 对粒子群中粒子的适应值进行了比较, 对金属-介质光栅滤光片结构进行了理论分析和仿真优化, 在一定范围内找到最优参量。结果表明, 根据MATLAB仿真结果进行优化, 得到周期为0.300μm, 金属光栅厚度为0.035μm, 介质光栅厚度为0.400μm, 光栅占空比为0.77; 在TM光垂直入射时, 该结构对波长为0.65μm的红光透射率达到80.27%, 旁带透射效率不超过15%; 该结构实现了特定波长光的高效透射, 从而实现了滤光。该结构为亚波长光栅的设计、制备研究和实际应用提供了参考。

Abstract

In order to optimize the structure parameters of the device, the period, height and duty ratio of grating structure were taken as the optimized particles. By using particle swarm optimization algorithm and rigorous coupled wave analysis algorithm, fitness values of the particles in particle swarm were compared. After theoretical analysis and simulative optimization of the structure of metal-medium grating filter, the optimal parameters were found in a certain range. The results show that, according to MATLAB simulation results, structure parameters are optimized: period is 0.300μm, the thickness of metal grating is 0.035μm, the thickness of dielectric grating is 0.400μm and grating duty ratio is 0.77. When TM light is vertically incident, the transmission rate of structure to red light in 0.65μm wavelength is 80.27% and the transmission rate of the side bands is less than 15%. This structure achieves high transmission to specific wavelength light and then achieves light filtering. This structure provides the reference for the design, fabrication and practical application of sub-wavelength gratings.

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高健, 王庆康, 王丹燕. 基于粒子群优化算法的透射滤光片设计[J]. 激光技术, 2018, 42(5): 617. GAO Jian, WANG Qingkang, WANG Danyan. Design of transmittance filters based on particle swarm optimization algorithm[J]. Laser Technology, 2018, 42(5): 617.

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