光谱学与光谱分析, 2016, 36 (4): 1255, 网络出版: 2016-12-20
6H-SiC单晶的激光刻蚀及光谱分析
Laser Ablation of 6H-SiC Single Crystals and Spectral Characterization
基本信息
| DOI: | 10.3964/j.issn.1000-0593(2016)04-1255-06 |
| 中图分类号: | O657.3 |
| 栏目: | |
| 项目基金: | National Basic Research Program of China under Grant (2011CB301904), Natural Science Foundation of China under Grant (11134006 and 51321091) |
| 收稿日期: | 2015-06-01 |
| 修改稿日期: | 2015-09-22 |
| 网络出版日期: | 2016-12-20 |
| 通讯作者: | 郁万成 (wancheng810@126.com) |
| 备注: | -- |
郁万成, 胡小波, 崔潆心, 陈秀芳, 徐现刚. 6H-SiC单晶的激光刻蚀及光谱分析[J]. 光谱学与光谱分析, 2016, 36(4): 1255. YU Wan-cheng, HU Xiao-bo, CUI Ying-xin, CHEN Xiu-fang, XU Xian-gang. Laser Ablation of 6H-SiC Single Crystals and Spectral Characterization[J]. Spectroscopy and Spectral Analysis, 2016, 36(4): 1255.
PDF全文
