6H-SiC单晶的激光刻蚀及光谱分析
郁万成, 胡小波, 崔潆心, 陈秀芳, 徐现刚. 6H-SiC单晶的激光刻蚀及光谱分析[J]. 光谱学与光谱分析, 2016, 36(4): 1255.
YU Wan-cheng, HU Xiao-bo, CUI Ying-xin, CHEN Xiu-fang, XU Xian-gang. Laser Ablation of 6H-SiC Single Crystals and Spectral Characterization[J]. Spectroscopy and Spectral Analysis, 2016, 36(4): 1255.
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郁万成, 胡小波, 崔潆心, 陈秀芳, 徐现刚. 6H-SiC单晶的激光刻蚀及光谱分析[J]. 光谱学与光谱分析, 2016, 36(4): 1255. YU Wan-cheng, HU Xiao-bo, CUI Ying-xin, CHEN Xiu-fang, XU Xian-gang. Laser Ablation of 6H-SiC Single Crystals and Spectral Characterization[J]. Spectroscopy and Spectral Analysis, 2016, 36(4): 1255.
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