镜面散射对显微物镜杂散光特性影响的仿真研究

胡慧杰; 巩岩; 武晓东

doi:doi:10.3788/lop52.101104

激光与光电子学进展, 2015, 52 (10): 101104, 网络出版: 2015-10-08

镜面散射对显微物镜杂散光特性影响的仿真研究下载： 880次

Simulation about Influence of Specular Scattering on Microscope Objective Stray Light Characteristics

论文大纲

胡慧杰 ^1,2,3,*巩岩 ²武晓东 ¹

作者单位

¹ 中国科学院苏州生物医学工程技术研究所江苏省医用光学重点实验室, 江苏苏州 215163

² 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林长春 130033

³ 中国科学院大学, 北京 100049

成像系统杂散光仿真测量表面粗糙度颗粒污染水平 imaging systems stray light simulation roughness cleanliness levels

AI 词云图 AI一句话精读 AI短摘要

注：本部分内容由 AI 自动生成，请您知悉。

摘要

杂散光是影响显微系统成像质量的重要因素之一，在光学镜面加工及光学镜面清洁过程中会带来不同程度的镜面散射，这部分镜面散射所带来的杂散光影响不可忽视。以放大倍率为20×，数值孔径为0.49 的显微物镜为基础，利用TracePro 光学分析软件，建立了黑斑法测量显微物镜杂散光系数的仿真模型，对照明数值孔径、照明视场以及黑斑位置三个影响杂散光测量条件的因素进行仿真探究，验证了模型的可行性。在此基础上，研究了表面粗糙度(2、5、10、20 nm)和表面颗粒污染水平(230、500、750)对不同NA 显微物镜杂散光的影响。仿真结果表明，表面粗糙度大于10 nm 或表面洁净度大于500 均会严重影响显微物镜像面杂散光的分布，降低显微物镜的成像质量，尤其对大NA显微物镜影响更为明显。因此，为控制镜面散射对显微系统性能的影响，应提高镜面加工工艺并保持镜面清洁。

Abstract

Stray light is one of the important factors affecting the image quality of microscopy systems. During the processing of optical elements, stray light caused by specular scattering can not be ignored. Taking microscope objectives with 20× magnification and NA=0.49 as a typical example and using the optical analysis software TracePro, a simulation model of measuring veiling glare of microscope objectives is built up. Through analyzing the factors affecting the model with different illuminance numerical apertures, different illuminance fields and different black spot positions, the feasibility of the model is verified. On this basis, the stray light intensity on the image plane with different NA microscope objectives is simulated quantitatively under the condition of different surface roughness (2, 5, 10, 20 nm) and different cleanliness levels (250, 500, 750). The results indicate that the surface roughness greater than 10 nm and the cleanliness level higher than 500 will change the stray light intensity distribution on the image plane, and affect the system performance significantly, especially for those microscope objectives with large NA. It is of critical importance to keep the surface of optical elements clean and to improve the processing technology of optical elements.

参考文献

[1] 原育凯. 光学系统杂散光的消除方法[J]. 大气与环境光学学报, 2007, 2(1): 6-10.

Yuan Yukai. Stray light suppressing measure of optical system[J]. Journal of Atmospheric and Environmental Optics, 2007, 2(1): 6-10.

[2] 舒星星, 刘卫林. 可见光光学系统杂散光抑制[J]. 激光与光电子学进展, 2014, 51(12): 121101.

Shu Xingxing, Liu Weilin. Suppression of stray light in visible light optical system[J]. Laser & Optoelectronics Progress, 2014, 51(12): 121101.

[3] 孙明哲, 张红鑫, 卢振武, 等. 大视场日冕仪光学系统杂散光抑制[J]. 激光与光电子学进展, 2014, 49(5): 052203.

Sun Mingzhe, Zhang Hongxin, Lu Zhenwu, et al.. Stray light suppression of the large field of view coronagraph optical system[J]. Laser & Optoelectronics Progress, 2014, 49(5): 052203.

[4] 朱越, 高万荣. 全场高分辨生物组织光学层析成像[J]. 中国激光, 2014, 41(8): 0804002.

Zhu Yue, Gao Wanrong. High-resolution full-field optical coherence tomography for biological tissue[J]. Chinese J Lasers, 2014, 41(8): 0804002.

[5] 魏通达, 张运海, 肖昀, 等. 偏振态和有效数值孔径对共聚焦全内反射显微术分辨率的影响[J]. 激光与光电子学进展, 2014, 51(1): 011102.

Wei Tongda, Zhang Yunhai, Xiao Yun, et al.. Effects of polarization state and effective numerical aperture on the resolution in confocal total internal reflection microscopy[J]. Laser & Optoelectronics Progress, 2014, 51(1): 011102.

[6] 王云新, 王大勇, 杨怡姝, 等. 数字全息技术在生物医学成像和分析中的应用[J]. 中国激光, 2014, 41(2): 0209002.

Wang Yunxin, Wang Dayong, Yang Yishu, et al.. Application and analysis in the biomedicine field using digital holographic technology[J]. Chinese J Lasers, 2014, 41(2): 0209002.

[7] S Matsuda, T Nitoh. Flare as applied to photographic lenses[J]. Appl Opt, 1972, 11(8): 1850-1856.

[8] S Martin. Glare characteristics of lenses and optical instruments in the visible region[J]. Opt Act, 1972, 19(6): 499-513.

[9] R J Brewer. The measurement of veiling glare[J]. Opt Act, 1972, 19(6): 547-548.

[10] 刘瑞祥.杂光系数及其测量[J]. 光学机械, 1977, (5): 11-16.

[11] 张国玉, 李风春, 高玉军. 光学系统杂光黑斑测量的理论研究[J]. 光学技术, 1997, 3(2): 37-40.

Zhang Guoyu, Li Fengchun, Gao Yujun. Theoretical study of stray light black-spot measurement for optical system[J]. Optical Technology, 1997, 3(2): 37-40.

[12] 张国玉, 李风春. 杂光测试装置的研究及改进[J]. 光学技术, 1994, 108(4): 21-27.

Zhang Guoyu, Li Fengchun. Research and advancement of measuring equipment of veiling glare[J]. Optical Technology, 1994, 108(4): 21-27.

[13] 王雅黎, 刘瑞祥, 曹明. 显微物镜杂光特性普查对比的结果与分析[J]. 光学机械, 1992, (1): 30-37.

Wang Yali, Liu Ruixiang, Cao Ming. The results and analysis of a survey of the veiling glare characteristics of microscope objectives[J]. Guangxue Jixie, 1992, (1): 30-37.

[14] 显微镜物杂散光测试组-上海光学仪器研究所. 显微物镜杂散光测试技术研究[J]. 光学仪器, 1988, 10(2): 5-10.

Research Group for Measuring Veiling Glare of Microscope Objective -Shanghai Institute of Optical Instruments. Technical research on measuring veiling glare of microscope objectives[J]. Optical Instruments, 1988, 10(2): 5-10.

[15] P R Spyak, W L Wolfe. Scatter from particulate-contaminated mirrors part 2-4[J]. Opt Eng, 1992, 31(8): 1757-1784.

[16] 国家标准化管理委员会. GB/T 10988-2009 光学系统杂(散)光测量方法[S]. 北京：中国标准出版社, 2009.

Standardization Administration. GB/T 10988-2009 Veiling glare of optical systems -methods of measurement[S]. Beijing: China Standard Press, 2009.

[17] 王美钦, 王忠厚, 白加光. 高光谱成像仪的杂散光分析[J]. 红外与激光工程, 2012, 41(6): 1532-1537.

Wang Meiqin, Wang Zhonghou, Bai Jiaguang. Stray light analysis for hyper-spectral imaging spectrometer[J]. Infrared and Laser Engineering, 2012, 41(6): 1532-1537.

[18] S M Pompes, R R Pfisterer, J M Morgan. A stray light analysis of apache point observatory 3.5 meter telescope system [C]. SPIE, 2003, 4842: 128-138.

[19] 钟兴, 张雷, 金光. 反射光学系统杂散光的消除[J]. 红外与激光工程, 2008, 37(2): 316-318.

Zhong Xing, Zhang Lei, Jin Guang. Stray light removing of reflective optical system[J]. Infrared and Laser Engineering, 2008, 37(2): 316-318.

[20] 莱金著. 镜头设计[M]. 周海宪, 程云芳, 译. 北京：机械工业出版社, 2011: 123-125.

M Laikin. Lens Design[M]. Zhou Haixian, Chen Yunfang, Trans. Beijing: China Machine Press, 2011: 123-125.

[21] 肖静, 张彬, 姚秀文, 等. 镜面污染对红外光学系统杂散辐射性能的影响[J]. 红外与激光工程, 2011, 40(3): 402-407.

Xiao Jing, Zhang Bin, Yao Xiuwen, et al.. Influence of contaminated mirror on the stray radiation performance of infrared optical systems[J]. Infrared and Laser Engineering, 2011, 40(3): 402-407.

[22] 陈浩, 邾继贵, 薛彬. 粗糙表面散射特性对基于PSD 的激光位移传感器测量精度的影响[J]. 中国激光, 2013, 40(8): 0808003.

Chen Hao, Zhu Jigui, Xue Bin. Impact of rough surface scattering characteristics to measurement accuracy of laser displacement sensor based on position sensitive detector[J]. Chinese J Lasers, 2013, 40(8): 0808003.

[23] H E Bennett. Scattering characteristics of optical materials[J]. Opt Eng, 1978, 17(5): 480-488.

[24] 石栋梁. 基于BRDF 的光机系统杂散辐射研究[D]. 哈尔滨: 哈尔滨工业大学, 2014.

Shi Dongliang. Research on Stray Light of Optical and Mechanical System Based on BRDF[D]. Harbin: Harbin Institute of Technology, 2014.

[25] K Balasubramanian, S Shaklan, A Give′ on. Stella coronagraph performance impact due to particulate contamination and scatter[C]. SPIE, 2009, 7440: 74400T.

[26] S Ellis, R N. Pfisterer. Advanced Technology Solar Telescope (ATST): Stray and Scattered Light Analysis[DB/OL]. http://dkist.nso.edu/sites/atst.nso.edu/files/docs/opt_sys/PhotonEngineering1.pdf

胡慧杰, 巩岩, 武晓东. 镜面散射对显微物镜杂散光特性影响的仿真研究[J]. 激光与光电子学进展, 2015, 52(10): 101104. Hu Huijie, Gong Yan, Wu Xiaodong. Simulation about Influence of Specular Scattering on Microscope Objective Stray Light Characteristics[J]. Laser & Optoelectronics Progress, 2015, 52(10): 101104.

镜面散射对显微物镜杂散光特性影响的仿真研究下载： 880次

关于本站 Cookie 的使用提示

全站搜索

镜面散射对显微物镜杂散光特性影响的仿真研究 下载： 880次

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索

镜面散射对显微物镜杂散光特性影响的仿真研究下载： 880次