大范围高精度激光诱导击穿光谱显微对焦系统 
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Wide-Range and High-Precision Microscopic Focusing System for Laser-Induced Breakdown Spectroscopy
1 山东大学(威海)机电与信息工程学院, 山东 威海 264200
2 山东大学燃气检测技术中心, 山东 威海 264200
3 华晨汽车工程研究院, 辽宁 沈阳 110000
图 & 表
图 1. LIBS探测自动显微对焦系统示意图
Fig. 1. Diagram of automatic microscopic focusing system for LIBS detection
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图 2. 两种离焦状态成像示意图
Fig. 2. Imaging of two defocus states
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图 3. 光斑不完全成像图
Fig. 3. Incomplete spot imaging
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图 4. 光斑完全成像图
Fig. 4. Complete spot imaging
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图 5. 光强分布图
Fig. 5. Light intensity distribution maps
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图 6. 离焦距离与图像双色光斑中心间距对应关系
Fig. 6. Relationship between the defocus distance and the two-color spot center distance
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图 7. 实物成像图
Fig. 7. Physical imaging maps
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表 1离焦距离与图像双色光斑中心距离对应关系
Table1. Relationship between the defocus distance and the two-color spot center distance
| Defocus distance /μm | Pixel distance /pixel | Defocus distance /μm | Pixel distance /pixel | Defocus distance /μm | Pixel distance /pixel |
|---|
| 475 | 1407.5000 | 150 | 223.3752 | -175 | 190.0569 | | 450 | 1327.5000 | 125 | 82.5207 | -200 | 393.7493 | | 425 | 1254.2000 | 100 | 27.3013 | -225 | 533.0809 | | 400 | 1175.4000 | 75 | 12.0203 | -250 | 661.4308 | | 375 | 1101.7000 | 50 | 8.6250 | -275 | 746.3239 | | 350 | 1026.5000 | 25 | 3.7311 | -300 | 817.1268 | | 325 | 980.3187 | 0 | 2.0381 | -325 | 887.7337 | | 300 | 917.3111 | -25 | 5.3427 | -350 | 944.5840 | | 275 | 885.0653 | -50 | 15.9099 | -375 | 1015.5000 | | 250 | 804.9607 | -75 | 67.5093 | -400 | 1114.6000 | | 225 | 715.3268 | -100 | 128.8011 | -425 | 1277.4000 | | 200 | 589.5747 | -125 | 149.4676 | -450 | 1401.8000 | | 175 | 412.7080 | -150 | 175.3470 | -475 | 1468.8000 |
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表 2图像像素亮度标准差
Table2. Standard deviation of image pixel brightness
| Defocus distance /μm | Horizontal STD | Vertical STD | Defocus distance /μm | Horizontal STD | Vertical STD |
|---|
| -80 | 9.1247 | 10.5315 | 20 | 13.7186 | 15.4348 | | -60 | 12.3589 | 13.5396 | 40 | 12.6334 | 13.3821 | | -40 | 13.5678 | 16.0603 | 60 | 10.7733 | 11.4970 | | -20 | 13.1859 | 16.3127 | 80 | 7.6790 | 7.4425 | | 0 | 14.2103 | 18.3880 | 100 | 6.1405 | 4.9038 |
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蒋章伟, 燕艳, 李阳, 毕云峰. 大范围高精度激光诱导击穿光谱显微对焦系统[J]. 光学学报, 2018, 38(12): 1215004. Zhangwei Jiang, Yan Yan, Yang Li, Yunfeng Bi. Wide-Range and High-Precision Microscopic Focusing System for Laser-Induced Breakdown Spectroscopy[J]. Acta Optica Sinica, 2018, 38(12): 1215004.
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