Design of shallow-etched multilayer dielectric grating with –1st order high diffraction efficiency

Jianpeng Wang; Yunxia Jin; Shijie Liu; Jianda Shao; Zhengxiu Fan

Chinese Optics Letters, 2010, 8 (s1): 29, Published Online: May. 14, 2010

Design of shallow-etched multilayer dielectric grating with –1st order high diffraction efficiency Download： 838次

Jianpeng Wang ^1,2Yunxia Jin ¹Shijie Liu ¹Jianda Shao ¹Zhengxiu Fan ¹

Author Affiliations

¹ Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² Graduate University of Chinese Academy of Sciences, Beijing 100049, China

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Jianpeng Wang, Yunxia Jin, Shijie Liu, Jianda Shao, Zhengxiu Fan. Design of shallow-etched multilayer dielectric grating with –1st order high diffraction efficiency[J]. Chinese Optics Letters, 2010, 8(s1): 29.