强激光与粒子束, 2011, 23 (8): 2106, 网络出版: 2011-09-20
HfO2顶层多层介质膜脉宽压缩光栅的Piranha溶液清洗
Cleaning multilayer dielectric pulse compressor gratings with top layer of HfO2 by Piranha solution
基本信息
DOI: | 10.3788/hplpb20112308.2106 |
中图分类号: | TH745 |
栏目: | ICF与激光等离子体 |
项目基金: | 国家高技术发展计划项目 |
收稿日期: | 2011-01-11 |
修改稿日期: | 2011-06-15 |
网络出版日期: | 2011-09-20 |
通讯作者: | 陈上碧 (chensb@mail.ustc.edu.cn) |
备注: | -- |
陈上碧, 盛斌, 邱克强, 刘正坤, 徐向东, 刘颖, 洪义麟, 付绍军. HfO2顶层多层介质膜脉宽压缩光栅的Piranha溶液清洗[J]. 强激光与粒子束, 2011, 23(8): 2106. Chen Shangbi, Sheng Bin, Qiu Keqiang, Liu Zhengkun, Xu Xiangdong, Liu Ying, Hong Yilin, Fu Shaojun. Cleaning multilayer dielectric pulse compressor gratings with top layer of HfO2 by Piranha solution[J]. High Power Laser and Particle Beams, 2011, 23(8): 2106.