HfO2顶层多层介质膜脉宽压缩光栅的Piranha溶液清洗
陈上碧, 盛斌, 邱克强, 刘正坤, 徐向东, 刘颖, 洪义麟, 付绍军. HfO2顶层多层介质膜脉宽压缩光栅的Piranha溶液清洗[J]. 强激光与粒子束, 2011, 23(8): 2106.
Chen Shangbi, Sheng Bin, Qiu Keqiang, Liu Zhengkun, Xu Xiangdong, Liu Ying, Hong Yilin, Fu Shaojun. Cleaning multilayer dielectric pulse compressor gratings with top layer of HfO2 by Piranha solution[J]. High Power Laser and Particle Beams, 2011, 23(8): 2106.
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陈上碧, 盛斌, 邱克强, 刘正坤, 徐向东, 刘颖, 洪义麟, 付绍军. HfO2顶层多层介质膜脉宽压缩光栅的Piranha溶液清洗[J]. 强激光与粒子束, 2011, 23(8): 2106. Chen Shangbi, Sheng Bin, Qiu Keqiang, Liu Zhengkun, Xu Xiangdong, Liu Ying, Hong Yilin, Fu Shaojun. Cleaning multilayer dielectric pulse compressor gratings with top layer of HfO2 by Piranha solution[J]. High Power Laser and Particle Beams, 2011, 23(8): 2106.
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