[1] 许伟才，黄玮，杨旺．投影光刻物镜倍率的公差分析与补偿［J］.光学学报,2011,31(11): 1122003.

    XU W C, HUANG W, YANG W. Magnification tolerancing and compensation for the lithography projection lens［J］.Acta Optica Sinica,2011,31(11): 1122003.(in Chinese)

[2] 钟掘. 机械工程学科发展战略报告［M］. 北京: 科学出版社，2010.

    ZHONG J. Strategic Development Report of Mechanical Engineering Discipline ［M］. Beijing: The Science Press, 2010. (in Chinese)

[3] RYU J W, GWEON D G, MOONT K S. Optimal design of a flexure hinge based XYΘwafer stage ［J］. Precision Engineering, 1997, 21: 18-28.

[4] YONG Y K, LU T F. Kinematic modeling of 3-RRR compliant micro-motion stages with flexure hinges ［J］. Mechanism and Machine Theory, 2009, 44: 1156-1175.

[5] 赵磊，巩岩，赵阳．光刻投影物镜中的透镜X-Y柔性微动调整机构［J］．光学 精密工程，2013，21(6): 12425-1432.

    ZHAO L, GONG Y, ZHAO Y. Flexure-based X-Y micro-motion mechanism used in lithographic lens［J］.Opt. Precision Eng., 2013，21(6): 12425-1432.(in Chinese)

[6] 鲁亚飞，范大鹏，范世珣，等.快速反射镜两轴柔性支撑设计［J］. 光学 精密工程，2010，18(12): 2574-2582.

    LU Y F, FAN D P, FAN SH X,et al..Design of two-axis elastic support for fast steering mirror ［J］.Opt. Precision Eng., 2010, 18(12): 2574-2582.(in Chinese)

[7] 郭抗，巩岩．轴向调节机构中调节力对光学元件面形的影响［J］．光学学报，2013，33(11): 1123001.

    GUO K, GONG Y. Effect of adjusting force on surface figure of optical element in axial adjustment mechanism ［J］.Acta Optica Sinica,2013,33(11): 1123001. (in Chinese)

[8] SMITH S T, CHETWYND D G, BOWEN D K. Design and assessment of monolithic high precision translation mechanisms ［J］. J. Phys. E: SciInstrum, 1987 ,20: 977-983.

[9] KIM H S, KIM E J, SONG B S. Diamond turning of large off-axis aspheric mirrors using a fast tool servo with on-machine measurement ［J］. Journal of Materials Processing Technology, 2004,146: 349-355.

[10] 周京博，孙涛，侯国安.双柔性支撑板快速伺服刀架优化设计及测试［J］. 光学 精密工程，2013，21(2): 349-355.

    ZHOU J B，SUN T，HOU G A. Optimal design and test of double elastic plate based fast tool serco［J］. Opt. Precision Eng., 2013, 21(2): 349-355.(in Chinese)

[11] 高鹏，颜国正，王志武.肠道微机器人柔性运动系统［J］.光学 精密工程, 2012, 20(3): 541-549.

    GAO P, YAN G ZH, WANG ZH W. Flexible incomotion system for gastrointestinal microrobots［J］. Opt. Precision Eng., 2012, 20(3): 541-549.(in Chinese)

[12] LOBONTIU N. Compliant Mechanisms: Design of Flexure Hinges ［M］. CRC Press, 2003.

[13] HOWELL L L. Compliant Mechanisms ［M］. New York: John Wiley & Sons Press, 2001.

[14] 黄真，赵永生，赵铁石. 高等空间机构学［M］. 北京: 高等教育出版社，2008.

    HUANG ZH, ZHAO Y SH, ZHAO T SH. Advanced Spatial Mechanism ［M］. Beijing: High Education Press, 2008. (in Chinese)

[15] GAO F,LI W M,ZHAO X CH.New kinematic structures for 2-,3-,4-,and 5-DOF parallel manipulator designs ［J］. Mechanism and Machine Theory,2002,37(11): 1395-1411.

[16] 杨廷力,刘安心,罗玉峰,等.机器人机构拓扑结构设计［M］. 北京: 科学出版社，2012.

    YANG T L, LIU A X, LUO Y F, et al..Theory and Application of Robot Mechanism Topology［M］. Beijing: The Science Press, 2012. (in Chinese)

[17] 王华，张宪民，邓俊广.基于压电陶瓷驱动的精密定位平台研究测试技术学报［J］.测试技术学报，2007，21(4): 295-300.

    WANG H, ZHANG X M, DENG J G. Research on a precision positioning stage based on piezoelectric actuators［J］.Journal of Test and Measurement Technology，2007，21(4): 295-300. (in Chinese)

[18] 孙立宁，董为，杜志江.基于大行程柔性铰链的并联机器人刚度分析［J］.机械工程学报，2005，41(8): 90-95.

    SUN L N, DONG W, DU ZH J. Stiffness analysis on a wide-range flexure hinge-based parallel manipulator ［J］. Chinese Journal of Mechanical Engineering，2005，41(8): 90-95. (in Chinese)

[19] 于靖军，裴旭，毕树生, 等.柔性铰链机构设计方法的研究进展［J］. 机械工程学报,2010,46(13): 2-13.

    YU J J, PEI X, BI SH SH,et al..State-of-arts of design method for flexure mechanisms ［J］. Chinese Journal of Mechanical Engineering，2010，46(13): 2-13. (in Chinese)

[20] 胡鹏浩,张毅，郑群.3-RRR并联微动机器人结构误差对其运动精度的影响［J］.制造业自动化,2008,30(12): 66-68.

    HU P H, ZHANG Y, ZHENG Q. Structure error lnfluence on the precision of 3-RRR micro-motion stage［J］. Manufacturing Automation,2008,30(12): 66-68. (in Chinese)