Photonics Research, 2019, 7 (4): 04000473, Published Online: Apr. 11, 2019  

Transparent conductive oxide-gated silicon microring with extreme resonance wavelength tunability

Author Affiliations
School of Electrical Engineering and Computer Science, Oregon State University, Corvallis, Oregon 97331, USA
Abstract
Transparent conductive oxides have attracted escalating research interest for integrated photonic devices and metasurfaces due to the extremely large electro-optic modulation of the refractive index by the free-carrier-induced plasma dispersion effect. In this paper, we have designed and fabricated a silicon microring resonator using an indium-tin oxide gate as the electric-tuning electrode. It achieved an ultralarge resonance wavelength tunability of 271 pm/V, which is obtained through the reduced width of the ring waveguide and a high-dielectric-constant HfO2 insulator. We demonstrated a broad resonance wavelength tuning range of over 2 nm with an ultrafast response time of less than 12 ns and near-zero static power consumption, which outperforms traditional thermal tuning.

Erwen Li, Behzad Ashrafi Nia, Bokun Zhou, Alan X. Wang. Transparent conductive oxide-gated silicon microring with extreme resonance wavelength tunability[J]. Photonics Research, 2019, 7(4): 04000473.

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