基于微环谐振腔的可调谐滤波器的研究

采用深紫外光刻及等离子体刻蚀等工艺制备基于绝缘体上硅材料的环形滤波器，且微环半径仅为5 μm。制备基于单微环的4 通道光分插复用器，器件尺寸仅为3000 μm×500 μm。测试结果表明，该器件可以很好地实现上下载功能。其自由频谱宽度约为19.6 nm，最大消光比为19.76 dB。同时优化设计制备基于跑道型双微环可调谐光分插复用器。对这两种结构的光分插复用器的相邻信道间串扰进行测试，基于单微环滤波器和跑道型双微环滤波器的信道间最大串扰分别为-11.94 dB 和-20.04 dB。所设计的基于双微环光分插复用器上下载通道与主信道间没有交叉波导结构，因此相邻通道串扰明显低于单环型的光分插复用器。同时设计并制备基于双微环PIN 结型电光调制器。当偏置电压增加到1.6 V 时，谐振峰发生0.78 nm 的蓝移，并对测试结果进行分析。

Abstract

Deep ultraviolet photolithography and inductively coupled plasma etching processes are adopted to fabricate the filters based on silicon-on-insulator micro-ring resonators, and the radius is only 5 μm. A fourchannel optical add-drop multiplexer based on single micro-ring is fabricated, and the size of the device is only 3000 μm×500 μm. The test results show that the device can perfectly realize the upload and download functions. The free spectral range is about 19.6 nm and the maximum extinction ratio is 19.76 dB. Meanwhile, a reconfigurable optical add-drop multiplexer based on dual racetrack micro-ring resonator is optimally designed and fabricated. The adjacent crosstalks of the two kinds of optical add-drop multiplexer based on single micro-ring and dual racetrack micro-ring respectively are tested, and the maximum adjacent crosstalks are -11.94 dB and -20.04 dB, respectively. Because there is no cross-section between the add-drop channels and the backbone in dual racetrack optical add-drop multiplexer, the adjacent crosstalk is apparently less than the single micro-ring optical add-drop multiplexer. PIN junction modulator based on dual racetrack micro-ring resonators is designed and fabricated. When the added voltage reaches 1.6 V, the resonant peak has a blue shift of 0.78 nm, finally the test results are analyzed.

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吴丹宁, 吴远大, 王玥, 安俊明, 胡雄伟. 基于微环谐振腔的可调谐滤波器的研究[J]. 光学学报, 2016, 36(1): 0123002. Wu Danning, Wu Yuanda, Wang Yue, An Junming, Hu Xiongwei. Research on Tunable Filter Based on Micro-Ring Resonators[J]. Acta Optica Sinica, 2016, 36(1): 0123002.

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