微加工薄膜变形镜本征模分析
李恩德, 戴云, 王海英, 张雨东. 微加工薄膜变形镜本征模分析[J]. 强激光与粒子束, 2006, 18(8): 1265.
李恩德, 戴云, 王海英, 张雨东. Eigen mode of micromachined membrane deformable mirror[J]. High Power Laser and Particle Beams, 2006, 18(8): 1265.
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李恩德, 戴云, 王海英, 张雨东. 微加工薄膜变形镜本征模分析[J]. 强激光与粒子束, 2006, 18(8): 1265. 李恩德, 戴云, 王海英, 张雨东. Eigen mode of micromachined membrane deformable mirror[J]. High Power Laser and Particle Beams, 2006, 18(8): 1265.