Collection Of theses on high power laser and plasma physics, 2016, 14 (1): 0904002, Published Online: May. 26, 2017  

Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements

Author Affiliations
1 中国科学院上海光学精密机械研究所高功率激光物理国家实验室, 上海 201800
2 中国科学院大学, 北京 100049
Copy Citation Text

Yang Xianghui, Shen Weixing, Zhang Xuejie, Ma Xiaojun. Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements[J]. Collection Of theses on high power laser and plasma physics, 2016, 14(1): 0904002.

References

[1] Wang D Y, English R E, Jr, Aikens D M. Implementation of ISO 10110 optics drawing standards for the National Ignition Facility[C]. SPIE, 1999, 3782: 502-508.

[2] Lawson J K, Wolfe C R, Manes K R, et al. Specification of optical components using the power spectral density function[C]. SPIE, 1995, 2536: 38-50.

[3] Spaeth M L, Manes K R, Widmayer C C, et al. National Ignition Facility wavefront requirements and optical architecture[J]. Optical Engineering, 2004, 43(12): 2854-2865.

[4] 刘红婕, 景峰, 左言磊, 等. 激光波前功率谱密度与焦斑旁瓣的关系[J]. 中国激光, 2006, 33(4): 504-508.

    Liu Hongjie, Jing Feng, Zuo Yanlei, et al. Relation between wavefront power spectral density and wings of focal spot[J]. Chinese J Lasers, 2006, 33(4): 504-508.

[5] 朱坪, 谢兴龙, 焦兆阳, 等. 大口径超短脉冲聚焦系统波前误差对时间信噪比的影响[J]. 光学学报, 2014, 34(10): 1032001.

    Zhu Ping, Xie Xinglong, Jiao Zhaoyang, et al. Influence of wave-front error on temporal signal-to-noise ratio in large aperture ultrashort pulse focusing system[J]. Acta Optica Sinica, 2014, 34(10): 1032001.

[6] Aikens D M, Wolfe C R, Lawson J K. The use of Power Spectral Density (PSD) functions in specifying optics for the National Ignition Facility[C]. SPIE, 1995, 2576: 281-292.

[7] 沈卫星, 徐德衍. 强激光光学元件表面功率谱密度函数估计[J]. 强激光与粒子束, 2000, 12(4): 392-396.

    Shen Weixing, Xu Deyan. Power spectral density function estimate in high power laser optical element surface[J]. High Power Laser and Particle Beams, 2000, 12(4): 392-396.

[8] 许乔, 顾元元, 柴林, 等. 大口径光学元件波前功率谱密度检测[J]. 光学学报, 2001, 21(3): 344-347.

    Xu Qiao, Gu Yuanyuan, Chai Lin, et al. Measurement of wavefront power spectral density of large optical components[J]. Acta Optica Sinica, 2001, 21(3): 344-347.

[9] de Groot P, de Lega X C. Interpreting interferometric height measurements using the instrument transfer function[M]//Osten W. Fringe 2005. Heidelberg: Springer Berlin Heidelberg, 2005: 30-37.

[10] Elson J M, Bennett J M. Calculation of the power spectral density from surface profile data[J]. Applied Optics, 1995, 34(1): 201-208.

[11] Youngworth R N, Gallagher B B, Stamper B L. An overview of power spectral density (PSD) calculations[C]. SPIE, 2005, 5869: 58690U.

[12] Williams W H. NIF large optics metrology software: description and algorithms[R]. United States: Lawrence Livermore National Laboratory (LLNL), 2002.

[13] Galigekere R R, Holdsworth D W, Swamy M N S, et al. Moment patterns in the radon space[J]. Optical Engineering, 2000, 39(4): 1088-1097.

[14] 程晓锋, 郑万国, 蒋晓东, 等. 用功率谱密度坍陷评价光学元件波前中频误差特性[J]. 强激光与粒子束, 2005, 17(10): 1465-1468.

    Cheng Xiaofeng, Zheng Wanguo, Jiang Xiaodong, et al. Evaluating intermediate frequency error property of wavefront of optical components with PSD collapse[J]. High Power Laser and Particle Beams, 2005, 17(10): 1465-1468.

[15] Takacs P Z, Barber S, Church E L, et al. 2D spatial frequency considerations in comparing 1D power spectral density measurements[R]. United States: Brookhaven National Laboratory (BNL), 2010: OWE5.

[16] Sykora D M, de Groot P. Instantaneous measurement Fizeau interferometer with high spatial resolution[C]. SPIE, 2011, 8126: 812610.

[17] Church E L, Vorburger T V, Wyant J C. Direct comparison of mechanical and optical measurements of the finish of precision machined optical surfaces[J]. Optical Engineering, 1985, 24(3): 243388.

[18] Takacs P Z, Li M X, Furenlid K, et al. A step-height standard for surface-profiler calibration[C]. SPIE, 1993, 1995: 65-74.

[19] Wolfe C R, Downie J D, Lawson J K. Measuring the spatial frequency transfer function of phase-measuring interferometers for laser optics[C]. SPIE, 1996, 2870: 553-557.

[20] 张蓉竹, 许乔, 顾元元, 等. 大口径光学元件检测中的主要误差及其影响[J]. 强激光与粒子束, 2001, 13(2): 133-136.

    Zhang Rongzhu, Xu Qiao, Gu Yuanyuan, et al. Testing errors and its influence of the large aperture optical elements[J]. High Power Laser and Particle Beams, 2001, 13(2): 133-136.

[21] Novak E, Ai C, Wyant J C. Transfer function characterization of laser Fizeau interferometer for high-spatial-frequency phase measurements[C]. SPIE, 1997, 3134: 114-121.

Yang Xianghui, Shen Weixing, Zhang Xuejie, Ma Xiaojun. Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements[J]. Collection Of theses on high power laser and plasma physics, 2016, 14(1): 0904002.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!