全息光刻和二次显影法制备柱形二维光子晶体
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曹远迎, 张永刚, 李耀耀, 顾溢, 李爱珍, 李好斯白音. 全息光刻和二次显影法制备柱形二维光子晶体[J]. 红外与毫米波学报, 2014, 33(1): 45. CAO Yuan-Ying, ZHANG Yong-Gang, LI Yao-Yao, GU Yi, LI Ai-Zhen, LI Hao-Si-Bai-Yin. Fabrication of column shape two dimensional photonic crystals： double developments in holographic lithography process[J]. Journal of Infrared and Millimeter Waves, 2014, 33(1): 45.
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