自由曲面镜片波前像差扩束-缩束拼接技术

禹静; 蒋威炜; 沈小燕

doi:doi:10.3788/gzxb20194808.0822002

光子学报, 2019, 48 (8): 0822002, 网络出版: 2019-11-28

自由曲面镜片波前像差扩束-缩束拼接技术

Wavefront Aberration Beam Expansion-shrinkage Splicing Technology of Free-form Surface Lens

论文大纲

禹静 ^*蒋威炜沈小燕

作者单位

中国计量大学计量测试工程学院, 杭州 310018

摘要

为解决波前传感器检测自由曲面镜片时测量口径不匹配, 在拼接检测方法中测量过程及数据处理较为繁琐等问题, 提出了一种测量自由曲面镜片的方法.该方法在扩大单次测量光束直径后对自由曲面镜片波前像差进行检测, 再由波前传感器接收缩小后的带有扩束测量区域波前信息的光束.设计光路测量得到4个直径扩大10倍后的子孔径波前像差, 完成扩束子孔径的波前重构及拼接.为验证实验的可靠性, 对测得的扩束子孔径进行波前重构后与哈特曼传感器生成的子孔径像差峰谷值进行比较, 并观察扩束子孔径拼接波面的平整性.实验结果表明: 该方法能有效增大小口径波前传感器的测量范围, 提高检测效率, 可以用于大口径镜片的波前像差检测上.

Abstract

The measurement aperture is not matched when the wavefront sensor detects the free-form lens, and the measurement process and the data processing are cumbersome in the splicing detection method. To solve the problems above, a method is proposed for measuring the free-form surface lens. The wavefront aberration of a free-form surface lens is detected after expanding the diameter of a single measuring beam, and then the shrinked beam with the wavefront information of the beam expanding measurement region is received by the wavefront sensor. The sub-aperture wavefront aberrations of four diameters expanded by 10 times were obtained by designing the optical path measurement, and the wavefront reconstruction and splicing of the beam expansion sub-aperture were completed. In order to verify the reliability of the experiment, the measured beam aperture is reconstructed and compared with the subaperture peak and valley values generated by the Hartmann sensor, and the flatness of the beam aperture of the beam expander is observed. The experimental results show that the method can effectively increase the measurement range of the small-bore wavefront sensor and improve the detection efficiency. It can be used for the detection of wavefront aberration of large-diameter lenses.

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禹静, 蒋威炜, 沈小燕. 自由曲面镜片波前像差扩束-缩束拼接技术[J]. 光子学报, 2019, 48(8): 0822002. YU Jing, JIANG Wei-wei, SHEN Xiao-yan. Wavefront Aberration Beam Expansion-shrinkage Splicing Technology of Free-form Surface Lens[J]. ACTA PHOTONICA SINICA, 2019, 48(8): 0822002.

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