利用半导体激光器线性调频外差干涉原理及分频复用技术构成的新型光纤位移传感器,可同时进行多点位移测量。测量范围为±1 mm,精度为±0.15 μm(3σ)。研究了光强因素对其测量精度的影响。

Reported here is a new optical fiber displacement sensor based on the principles of laser diode linear frequency-modulation heterodyne interference and frequency-division multiplexing technique. Many points displacement can be measured at the same time. The measurement range of displacement is ±1 mm with an accuray of ±0.15 μm(3σ). The influence of light intensity on measurement accuracy is studied.