光学学报, 2013, 33 (10): 1009001, 网络出版: 2013-08-21   

双波长数字显微像面全息术测量微结构表面形貌

Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography
作者单位
天津大学精密测试技术及仪器国家重点实验室, 天津 300072
引用该论文

曾雅楠, 汪飞, 雷海, 胡晓东, 胡小唐. 双波长数字显微像面全息术测量微结构表面形貌[J]. 光学学报, 2013, 33(10): 1009001.

Zeng Yanan, Wang Fei, Lei Hai, Hu Xiaodong, Hu Xiaotang. Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography[J]. Acta Optica Sinica, 2013, 33(10): 1009001.

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曾雅楠, 汪飞, 雷海, 胡晓东, 胡小唐. 双波长数字显微像面全息术测量微结构表面形貌[J]. 光学学报, 2013, 33(10): 1009001. Zeng Yanan, Wang Fei, Lei Hai, Hu Xiaodong, Hu Xiaotang. Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography[J]. Acta Optica Sinica, 2013, 33(10): 1009001.

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