光学学报, 2013, 33 (10): 1009001, 网络出版: 2013-08-21
双波长数字显微像面全息术测量微结构表面形貌
Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography
图 & 表
曾雅楠, 汪飞, 雷海, 胡晓东, 胡小唐. 双波长数字显微像面全息术测量微结构表面形貌[J]. 光学学报, 2013, 33(10): 1009001. Zeng Yanan, Wang Fei, Lei Hai, Hu Xiaodong, Hu Xiaotang. Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography[J]. Acta Optica Sinica, 2013, 33(10): 1009001.