递进式脉冲激光沉积CNx薄膜的组织结构与摩擦学特性
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郑晋翔, 郑晓华, 沈涛, 杨芳儿, 宋仁国. 递进式脉冲激光沉积CNx薄膜的组织结构与摩擦学特性[J]. 中国激光, 2012, 39(6): 0607001. Zheng Jinxiang, Zheng Xiaohua, Shen Tao, Yang Fang′er, Song Renguo. Microstructure and Triobological Behavior of CNx Films Deposited by Iterative Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2012, 39(6): 0607001.