电热式微机电系统微镜傅里叶变换红外光谱仪
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陆安江, 张正平, 白忠臣, 陈巧, 秦水介. 电热式微机电系统微镜傅里叶变换红外光谱仪[J]. 红外与激光工程, 2016, 45(5): 0520007. Lu Anjiang, Zhang Zhengping, Bai Zhongchen, Chen Qiao, Qin Shuijie. Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror[J]. Infrared and Laser Engineering, 2016, 45(5): 0520007.