光学学报, 2013, 33 (1): 0111003, 网络出版: 2012-12-14   

基于空间像自适应降噪的投影物镜波像差检测方法

Projection Lens Wave-Front Aberration Measurement Method Based on Adaptive Aerial Image Denoising
作者单位
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学, 北京 100049
引用该论文

杨济硕, 李思坤, 王向朝, 闫观勇, 徐东波. 基于空间像自适应降噪的投影物镜波像差检测方法[J]. 光学学报, 2013, 33(1): 0111003.

Yang Jishuo, Li Sikun, Wang Xiangzhao, Yan Guanyong, Xu Dongbo. Projection Lens Wave-Front Aberration Measurement Method Based on Adaptive Aerial Image Denoising[J]. Acta Optica Sinica, 2013, 33(1): 0111003.

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杨济硕, 李思坤, 王向朝, 闫观勇, 徐东波. 基于空间像自适应降噪的投影物镜波像差检测方法[J]. 光学学报, 2013, 33(1): 0111003. Yang Jishuo, Li Sikun, Wang Xiangzhao, Yan Guanyong, Xu Dongbo. Projection Lens Wave-Front Aberration Measurement Method Based on Adaptive Aerial Image Denoising[J]. Acta Optica Sinica, 2013, 33(1): 0111003.

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