Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry

Chao FANG; Yang XIANG; Keqi QI; Dawei CHEN

doi:doi:10.1007/s13320-018-0500-2

Photonic Sensors, 2018, 8 (3): 03255, Published Online: Aug. 4, 2018

Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry

论文大纲

Chao FANG ^1,2,*Yang XIANG ¹Keqi QI ^1,2Dawei CHEN ³

Author Affiliations

¹ State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

² University of Chinese Academy of Sciences, Beijing 100039, China

³ Jilin University, Changchun 130012, China

Calibration phase measurement phase shifting interferometry

Abstract

In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately proportional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2° and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.

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Chao FANG, Yang XIANG, Keqi QI, Dawei CHEN. Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry[J]. Photonic Sensors, 2018, 8(3): 03255.

Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry

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