光学学报, 1994, 14 (7): 783, 网络出版: 2007-08-17
SOI梯形大截面单模脊形波导的研制
Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section
摘要
报道了硅片直接键合SOI单模梯形大截面脊形波导的研制.对于波长为1.3 μm的光，这种脊形波导的传输损耗小于0.85 dB/cm.
Abstract
A SOI (silicon-on- insulator ) single- mode rib waveguide with large trapezoidal cross-section formed by SDB (silicon wafers direct bonding) process has been fabricated. And the SDB SOI rib waveguide losses are below 0.85 dB/cm by measurements at a wavelength of 1.3 μm.
参考文献
赵策洲, 刘恩科, 李国正. SOI梯形大截面单模脊形波导的研制[J]. 光学学报, 1994, 14(7): 783. 赵策洲, 刘恩科, 李国正. Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section[J]. Acta Optica Sinica, 1994, 14(7): 783.
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