飞秒激光多光束干涉光刻硅表面减反微结构

为了得到均匀分布的硅表面微结构，提出了一种利用多束激光干涉光刻的方法来实现对硅表面微结构分布特征的控制.利用空间光调制器实现飞秒激光多光束干涉，形成分布均匀、周期可控的空间点阵，利用聚焦的空间点阵在单晶硅表面烧蚀得到规则分布的凹坑状结构，并通过改变附加给空间光调制器的相位实现对微结构分布特征及间距的控制.用扫描电子显微镜和分光光度计分别对结构的形貌特征和光学特性进行了测量，结果表明：采用底角为2°的四棱锥镜相位形成四光束干涉，通过10×物镜聚焦，在激光功率25 mW、曝光时间30 s时，可以形成间距约为3.3 μm的密排凹坑微结构,所形成的凹坑结构具有良好的减反效果，在1.2~2 μm近红外波段的透过率相对抛光硅平均提高了11.5%.

Abstract

In order to obtain uniform distribution silicon surface microstructure, a new method was proposed based on multibeam interference lithography to relaise the controlling of the distribution character of the microstructure. Femtosecond laser multibeam interference was formed by Spatial Light Modulator (SLM), and the uniform distribution multispots with the controllable period were generated. By using these multispots, the regular distribution concave structures were fabricated on silicon surface, and the distribution character and period was flexiblly controlled by shift the phase masks on SLM. The morphology and optical character of the microstructure were measured with Scanning Electron Microscopy (SEM) and spectrophotometer. Experimental results show that the closepacked concave structure with the period of about 3.3 μm can be fabricated on the silicon surface under special parameters (10× focusing lens, laser power of 25 mW, exposing time of 30 s) by loading the phase of 4facet pyramid lens with the base angle of 2°; the formed structure shows good effect of antireflection; its transmission at the near infrared band of 1.2~2 μm enhances 11.5% in comparison with the polished silicon.

参考文献

[1] HUANG Y F, CHATTOPADHYAY S, JEN Y J, et al. Improved broadband and quasiomnidirectional antireflection properties with biomimetic silicon nanostructures［J］. Nature Nanotechnology, 2007, 2(12): 770-774.

[2] TULL B R, CAREY J E, MAZUR E, et al. Silicon surface morphologies after femtosecond laser irradiation［J］. Mrs Bulletin, 2006, 31(8): 626-633.

[3] SHEN M Y, CROUCH C H, CAREY J E, et al. Femtosecond laserinduced formation of submicrometer spikes on silicon in water［J］. Applied Physics Letters, 2004, 85(23): 5694-5696.

[4] SHEN M Y, CROUCH C H, CAREY J E, et al. Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask［J］. Applied Physics Letters, 2003, 82(11): 1715-1717.

[5] IMAMOTO H, KANEHIRA S, WANG X, et al. Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser［J］. Optics Letters, 2011, 36(7): 1176-1178.

[6] HAYASAKI Y, NISHITANI M, TAKAHASHI H, et al. Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing［J］. Applied. Physics. A: Materials Science and Processing, 2012, 107(2): 357-362.

[7] 张恒，周云，周雷，等.纳秒激光刻蚀玻璃基质铬薄膜直写微光栅结构［J］. 光子学报,2009, 38(2): 241-244.

ZHANG Heng, ZHOU Yun, ZHOU Lei, et al. Fabrication of micrograting structures by nanosecond laser ablation of chrome film on glass substrate［J］. Acta Photonica Sinica, 2009, 38(2): 241-244.

[8] SI J H, QIU J R, ZHAI J F. Photoinduced permanent gratings inside bulkazodyedoped polymers by the coherent field of a femtosecond laser［J］. Applied Physics Letters, 2002, 80(3): 359-361.

[9] 李响, 庞兆广, 张新平. 大面积金纳米线光栅的制备［J］. 光子学报,2011, 40(12): 1850-1854.

LI Xiang, PANG Zhaoguang, ZHANG Xingping. Fabrication of largearea gold nanowires grating［J］. Acta Photonica Sinica, 2011, 40(12): 1850-1854.

[10] JIA X, JIA T Q, DING L E, et al. Complex periodic micro/nanostructures on 6HSiC crystal induced by the interference of three femtosecond laser beams［J］. Optics Letters, 2009, 34(6): 788-790.

[11] 孙慧婷, 宋正勋, 翁占坤, 等. 利用干涉光刻和双光子聚合技术制造带有功能缺陷的二维光子晶体［J］. 光子学报, 2011, 40(z1): 1-6.

SUN Huiting, SONG Zhengxun, WENG Zhankun, et al. Fabrication of twodimensional photonic crystal structure with defect by holographic lithography and twophoton polymerization［J］. Acta Photonica Sinica, 2011, 40(z1): 1-6.

[12] KONDO T, MATSUO S, JUODKAZIS S, et al. Femtosecond laser interference technique with diffractive beam splitter for fabrication of threedimensional photonic crystals［J］. Applied Physics Letters, 2001, 79(6): 725-727.

[13] LEI M, YAO B L, RUPP R A. Structuring by multibeam interference using symmetric pyramids［J］. Optics Express, 2006, 14(12): 5803-5811.

[14] ESCUTI M J, CRAWFORD G P. Holographic photonic crystals［J］. Optical Engineering, 2004, 43(9): 19731987.

贺锋涛, 周强, 杨文正, 龙学文, 白晶, 程光华. 飞秒激光多光束干涉光刻硅表面减反微结构[J]. 光子学报, 2013, 42(5): 515. HE Fengtao, ZHOU Qiang, YANG Wenzheng, LONG Xuewen, BAI Jing, CHENG Guanghua. Femtosecond Laser Multibeam Interference Lithography Antireflective Microstructure on Silicon Surface[J]. ACTA PHOTONICA SINICA, 2013, 42(5): 515.

飞秒激光多光束干涉光刻硅表面减反微结构

关于本站 Cookie 的使用提示

全站搜索

飞秒激光多光束干涉光刻硅表面减反微结构

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索