发光学报, 2013, 34 (3): 308, 网络出版: 2013-04-07   

氩、氢混合等离子体处理对GaAs表面性质及发光特性的影响

Effects of Ar and H2 Plasma Treatment on The Surface Character and Luminescence Properties of GaAs Substrates
作者单位
长春理工大学 高功率半导体激光国家重点实验室, 吉林 长春130022
引用该论文

王云华, 周路, 乔忠良, 高欣, 薄报学. 氩、氢混合等离子体处理对GaAs表面性质及发光特性的影响[J]. 发光学报, 2013, 34(3): 308.

WANG Yun-hua, ZHOU Lu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Effects of Ar and H2 Plasma Treatment on The Surface Character and Luminescence Properties of GaAs Substrates[J]. Chinese Journal of Luminescence, 2013, 34(3): 308.

参考文献

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[2] Mariani G, Wang Y, Wong P S, et al. Three-dimensional core-shell hybrid solar cells via controlled in situ materials engineering [J]. Nano Lett., 2012, 12(7):3581-3586.

[3] Liu C X, Wang P C, Luo Y S, et al. Tb3+-Er3+ Couples as spectral converters in NaYF4 for GaAs solar cells [J]. Chin. J. Lumin.(发光学报), 2011, 32(11):1120-1125 (in Chinese).

[4] Vainshtein S, Javadyan V, Duan G Y, et al. Chalcogenide glass surface passivation of a GaAs bipolar transistor for unique avalanche terahertz emitters and picosecond switches [J]. Appl. Phys. Lett., 2012, 100(7):073505-1-4.

[5] Spicer W E, Lindau I, Gregory P E, et al. Synchrotron radiation studies of electronic structure and surface chemistry of GaAs, GaSb, and InP [J]. J. Vac. Sci. Technol., 1976, 13(4):780-785.

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[7] Janes D B, Kolagunta V R, Batistuta M. Nanoelectronic device applications of a chemically stable GaAs structure [J]. J. Vac. Scl. Technol., 1999, 17(4):1773-1777.

[8] Hinkle C L, Sonnet A M, Vogel E M, et al. Frequency dispersion reduction and bond conversion on n-type GaAs by in situ surface oxide removal and passivation [J]. Appl. Phys. Lett., 2007, 91(16):163512-3.

[9] Spicer W E, Chye P W, Skeath P R, et al. New and unified model for Schottky barrier and Ⅲ-Ⅴ insulator interface states formation [J]. J. Vac. Scl. Technol., 1979, 16(5):1422-1431.

[10] Lebedev M V, Mankel E, Mayer T, et al. Etching of GaAs (100) with aqueous ammonia solution:A synchrotron-photoemission spectroscopy study [J]. J. Phys. Chem. C, 2010, 114(49):21385-21389.

[11] Yoon E J, Gottscho R A, Donnelly V M, et al. GaAs surface modification by room temperature hydrogen plasma passivation [J]. Appl. Phys. Lett., 1992, 60(21):2681-2683.

王云华, 周路, 乔忠良, 高欣, 薄报学. 氩、氢混合等离子体处理对GaAs表面性质及发光特性的影响[J]. 发光学报, 2013, 34(3): 308. WANG Yun-hua, ZHOU Lu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Effects of Ar and H2 Plasma Treatment on The Surface Character and Luminescence Properties of GaAs Substrates[J]. Chinese Journal of Luminescence, 2013, 34(3): 308.

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