Author Affiliations
Abstract
1 College of Optoelectric and Electric Information Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
2 Laboratory of Photo-Electric Functional Films, College of Science, University of Shanghai for Science and Technology, Shanghai 200093, China
A novel composite model is put forward for humidity-sensitive material based on Maxwell-Garnett and effective medium theory. The analytical expression of the relation between effective refractive index and relative humidity is shown with different absorption factors and porosities. The larger the absorption factor is, the higher the refractive index is. The refractive index of humidity-sensitive SiO<sub>2</sub> film decreases with the increase of ceramic material porosity. The sensitivity of optical humidity sensor can reach the magnitude of 10<sup>?3</sup>. In comparison with the experimental humidity-sensing curve by the method of p-polarized reflectance and the analysis of mechanism, theoretical simulation is in agreement with experimental results. Therefore, this composite model is proved to be reasonable which lays new theoretical foundation in further research on optical humidity sensor.
光湿度传感器 感湿机理 复合模型 有效折射率 010.7340 Water 280.4788 Optical sensing and sensors 280.5715 Refractivity profiles 000.3860 Mathematical methods in physics Chinese Optics Letters
2009, 7(9): 756
1 上海理工大学光学与电子工程信息学院, 上海 200093
2 上海理工大学理学院光电功能薄膜实验室,上海 200093
介绍了光学湿度传感器及其机理，阐述了光湿敏薄膜材料与制备方法，总结了光学湿度传感器的发展现状，重点介绍了近年来发展的各种光学检测方法，最后提出了光学湿度传感器今后的研究发展方向。
光学湿度传感器 光学检测 湿敏材料 激光与光电子学进展
2007, 44(11): 41
